Plasma–surface interaction during low pressure microcrystalline silicon thin film growth

2014 ◽  
Vol 47 (22) ◽  
pp. 224003 ◽  
Author(s):  
J Palmans ◽  
W M M Kessels ◽  
M Creatore
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Low Pressure ◽  
Surface Interaction ◽  
Thin Film Growth ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film ◽  
Plasma Surface

Plasma-surface interaction and surface diffusion during silicon-based thin-film growth

2005 ◽  
Vol 33 (2) ◽  
pp. 234-235 ◽  
Author(s):  
J.P.M. Hoefnagels ◽  
E. Langereis ◽  
W.M.M. Kessels ◽  
M.C.M. van de Sanden
Keyword(s):  
Thin Film ◽  
Surface Diffusion ◽  
Film Growth ◽  
Surface Interaction ◽  
Thin Film Growth ◽  
Plasma Surface ◽  
Silicon Based

Textured (111) crystalline silicon thin film growth on flexible glass by e-beam evaporation

2015 ◽  
Vol 158 ◽  
pp. 269-273 ◽  
Author(s):  
Shane McMahon ◽  
Ashok Chaudhari ◽  
Zhouying Zhao ◽  
Harry Efstathiadis
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Crystalline Silicon ◽  
Thin Film Growth ◽  
Silicon Thin Film

Modeling of Epitaxial Silicon Thin‐Film Growth on a Rotating Substrate in a Horizontal Single‐Wafer Reactor

1995 ◽  
Vol 142 (12) ◽  
pp. 4272-4278 ◽  
Author(s):  
Hitoshi Habuka ◽  
Takatoshi Nagoya ◽  
Masatake Katayama ◽  
Manabu Shimada ◽  
Kikuo Okuyama
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
Epitaxial Silicon ◽  
Silicon Thin Film

Thin film growth from a low pressure plasma excited in a supersonic expanding gas jet

2009 ◽  
Vol 42 (9) ◽  
pp. 095205 ◽  
Author(s):  
C Wachtendorf ◽  
C Herweg ◽  
M Daeuber ◽  
J Benedikt ◽  
A von Keudell
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Low Pressure ◽  
Thin Film Growth ◽  
Gas Jet ◽  
Pressure Plasma ◽  
Low Pressure Plasma
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