Tungsten-Titanium as Advanced Material for RF-MEMS Switches

2008 ◽  
pp. 181-189 ◽  
Author(s):  
Stefan Klein ◽  
Helmut Seidel ◽  
Ulrich Schmidt ◽  
Volker Ziegler ◽  
Ulrich Prechtel ◽  
...  
Keyword(s):  
Rf Mems ◽  
Advanced Material ◽  
Mems Switches ◽  
Rf Mems Switches

Polarization switching antenna integrated with RF MEMS switches using silicon-on-quartz and BCB packaging platform

2010 ◽  
Author(s):  
Ik-Jae Hyeon ◽  
Jinwoo Chung ◽  
Sungjoon Lim ◽  
Jong-Man Kim ◽  
Chang-Wook Baek
Keyword(s):  
Rf Mems ◽  
Polarization Switching ◽  
Mems Switches ◽  
Rf Mems Switches

Lifetime characterization of capacitive RF MEMS switches

2005 ◽  
Author(s):  
Afshin Ziaei ◽  
Thierry Dean ◽  
Jean-Philippe Polizzi
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches

CMOS Compatible RF MEMS Switches with Serpentine Springs

2019 ◽  
Vol 18 (1) ◽  
pp. 9-14
Author(s):  
Xiao L. Evans ◽  
H.S. Gamble ◽  
P.T. Baine ◽  
S.J.N. Mitchell ◽  
J. Montgomery ◽  
...  
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Cmos Compatible

scholarly journals Lifetime characterization of capacitive power RF MEMS switches

2006 ◽  
Author(s):  
Afshin Ziaei ◽  
Thierry Dean ◽  
Yves Mancuso
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches

Effect of deposition parameters on surface roughness and consequent electromagnetic performance of capacitive RF MEMS switches: a review

2017 ◽  
Vol 27 (11) ◽  
pp. 113003 ◽  
Author(s):  
Zhiqiang Chen ◽  
Wenchao Tian ◽  
Xiaotong Zhang ◽  
Yongkun Wang
Keyword(s):  
Surface Roughness ◽  
Rf Mems ◽  
Mems Switches ◽  
Deposition Parameters ◽  
Rf Mems Switches ◽  
Electromagnetic Performance

Design and process considerations for fabricating RF MEMS switches on printed circuit boards

2005 ◽  
Vol 14 (6) ◽  
pp. 1311-1322 ◽  
Author(s):  
Hung-Pin Chang ◽  
Jiangyuan Qian ◽  
B.A. Cetiner ◽  
F. De Flaviis ◽  
M. Bachman ◽  
...  
Keyword(s):  
Printed Circuit Boards ◽  
Rf Mems ◽  
Circuit Boards ◽  
Mems Switches ◽  
Printed Circuit ◽  
Rf Mems Switches

A miniaturized reconfigurable broadband attenuator based on RF MEMS switches

2016 ◽  
Vol 26 (7) ◽  
pp. 074002 ◽  
Author(s):  
Xin Guo ◽  
Zhuhao Gong ◽  
Qi Zhong ◽  
Xiaotong Liang ◽  
Zewen Liu
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches
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