2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
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Author(s):  
Shasha Wang ◽  
Saurabh Chandorkar ◽  
James Salvia ◽  
Renata Melamud ◽  
Yu-Qiao Qu ◽  
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Author(s):  
Joumana El-Rifai ◽  
Ann Witvrouw ◽  
Ahmed Abdel Aziz ◽  
Robert Puers ◽  
Chris Van Hoof ◽  
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Author(s):  
Y. F. Yu ◽  
V. Kanna ◽  
T. Bourouina ◽  
S. H. Ng ◽  
P. H. Yap ◽  
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