2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
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9781424457618
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Polarization switching antenna integrated with RF MEMS switches using silicon-on-quartz and BCB packaging platform

2010 ◽  
Author(s):  
Ik-Jae Hyeon ◽  
Jinwoo Chung ◽  
Sungjoon Lim ◽  
Jong-Man Kim ◽  
Chang-Wook Baek
Keyword(s):  
Rf Mems ◽  
Polarization Switching ◽  
Mems Switches ◽  
Rf Mems Switches

Nonlinearity of hermetically encapsulated high-Q double balanced breathe-mode ring resonator

2010 ◽  
Author(s):  
Shasha Wang ◽  
Saurabh Chandorkar ◽  
James Salvia ◽  
Renata Melamud ◽  
Yu-Qiao Qu ◽  
...  
Keyword(s):  
Ring Resonator ◽  
High Q

Selective laser annealing for improved SiGe MEMS structural layers at 210°C

2010 ◽  
Author(s):  
Joumana El-Rifai ◽  
Ann Witvrouw ◽  
Ahmed Abdel Aziz ◽  
Robert Puers ◽  
Chris Van Hoof ◽  
...  
Keyword(s):  
Laser Annealing

An on-chip glass sphere resonator for label-free detection

2010 ◽  
Author(s):  
Y. F. Yu ◽  
V. Kanna ◽  
T. Bourouina ◽  
S. H. Ng ◽  
P. H. Yap ◽  
...  
Keyword(s):  
Glass Sphere ◽  
Label Free ◽  
Label Free Detection ◽  
On Chip
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