2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)

Electromagnetically driven ulutra-miniature single fiber scanner for high-resolution endoscopy fabricated on cylindrical substrates using mems process

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2010.5442377 ◽

2010 ◽

Cited By ~ 1

Author(s):

Tadao Matsunaga ◽

Ryunosuke Hino ◽

Wataru Makishi ◽

Masayoshi Esashi ◽

Yoichi Haga

Keyword(s):

High Resolution ◽

Single Fiber ◽

Mems Process

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Fabrication and characterization of novel polymer composite microcantilever sensors for explosive detection

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2010.5442340 ◽

2010 ◽

Cited By ~ 9

Author(s):

V Seena ◽

Anukool Rajoriya ◽

Avil Fernandes ◽

Karuna Dhale ◽

Prita Pant ◽

...

Keyword(s):

Polymer Composite ◽

Explosive Detection ◽

Microcantilever Sensors ◽

Fabrication And Characterization

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Realizing deep-submicron gap spacing for CMOS-MEMS resonators with frequency tuning capability via modulated boundary conditions

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2010.5442301 ◽

2010 ◽

Cited By ~ 7

Author(s):

Wen-Chien Chen ◽

Ming-Huang Li ◽

Weileun Fang ◽

Sheng-Shian Li

Keyword(s):

Boundary Conditions ◽

Frequency Tuning ◽

Deep Submicron ◽

Mems Resonators ◽

Cmos Mems ◽

Gap Spacing

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Selective laser annealing for improved SiGe MEMS structural layers at 210°C

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2010.5442501 ◽

2010 ◽

Cited By ~ 1

Author(s):

Joumana El-Rifai ◽

Ann Witvrouw ◽

Ahmed Abdel Aziz ◽

Robert Puers ◽

Chris Van Hoof ◽

...

Keyword(s):

Laser Annealing

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An on-chip glass sphere resonator for label-free detection

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2010.5442277 ◽

2010 ◽

Author(s):

Y. F. Yu ◽

V. Kanna ◽

T. Bourouina ◽

S. H. Ng ◽

P. H. Yap ◽

...

Keyword(s):

Glass Sphere ◽

Label Free ◽

Label Free Detection ◽

On Chip

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High tuning range and low pull-in voltage MEMS tunable capacitors filled with liquid crystal materials

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2010.5442526 ◽

2010 ◽

Author(s):

Chia-Wei Lin ◽

Yi-Jie Chen ◽

Chien-Wen Lee ◽

Wen-Pin Shih ◽

Pei-Zen Chang

Keyword(s):

Liquid Crystal ◽

Tuning Range ◽

Tunable Capacitors ◽

Liquid Crystal Materials

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Wafer-level vacuum sealing and encapsulation for fabrication of CMOS MEMS thermoelectric power generators

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2010.5442421 ◽

2010 ◽

Cited By ~ 4

Author(s):

Jin Xie ◽

Chengkuo Lee ◽

Ming-Fang Wang ◽

Hanhua Feng

Keyword(s):

Thermoelectric Power ◽

Wafer Level ◽

Power Generators ◽

Vacuum Sealing ◽

Cmos Mems

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Design and implementation of a novel “polymer joint” for thermal actuator current and thermal isolation

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2010.5442543 ◽

2010 ◽

Cited By ~ 4

Author(s):

Chih-Chun Lee ◽

Wen-Chih Chen ◽

Sz-Yuan Lee ◽

Weileun Fang

Keyword(s):

Thermal Actuator ◽

Thermal Isolation ◽

Design And Implementation

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Aluminum nitride as a masking material for the plasma etching of silicon carbide structures

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2010.5442492 ◽

2010 ◽

Cited By ~ 10

Author(s):

Debbie G. Senesky ◽

Albert P. Pisano

Keyword(s):

Silicon Carbide ◽

Aluminum Nitride ◽

Plasma Etching

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Silicon monolithic acousto-optic modulator

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2010.5442278 ◽

2010 ◽

Author(s):

Suresh Sridaran ◽

Sun Bhave

Keyword(s):

Acousto Optic Modulator

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2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Electromagnetically driven ulutra-miniature single fiber scanner for high-resolution endoscopy fabricated on cylindrical substrates using mems process

Fabrication and characterization of novel polymer composite microcantilever sensors for explosive detection

Realizing deep-submicron gap spacing for CMOS-MEMS resonators with frequency tuning capability via modulated boundary conditions

Selective laser annealing for improved SiGe MEMS structural layers at 210°C

An on-chip glass sphere resonator for label-free detection

High tuning range and low pull-in voltage MEMS tunable capacitors filled with liquid crystal materials

Wafer-level vacuum sealing and encapsulation for fabrication of CMOS MEMS thermoelectric power generators

Design and implementation of a novel “polymer joint” for thermal actuator current and thermal isolation

Aluminum nitride as a masking material for the plasma etching of silicon carbide structures

Silicon monolithic acousto-optic modulator

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2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Electromagnetically driven ulutra-miniature single fiber scanner for high-resolution endoscopy fabricated on cylindrical substrates using mems process

Fabrication and characterization of novel polymer composite microcantilever sensors for explosive detection

Realizing deep-submicron gap spacing for CMOS-MEMS resonators with frequency tuning capability via modulated boundary conditions

Selective laser annealing for improved SiGe MEMS structural layers at 210°C

An on-chip glass sphere resonator for label-free detection

High tuning range and low pull-in voltage MEMS tunable capacitors filled with liquid crystal materials

Wafer-level vacuum sealing and encapsulation for fabrication of CMOS MEMS thermoelectric power generators

Design and implementation of a novel “polymer joint” for thermal actuator current and thermal isolation

Aluminum nitride as a masking material for the plasma etching of silicon carbide structures

Silicon monolithic acousto-optic modulator

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Latest Publications