Characterization of stress in doped and undoped polycrystalline silicon before and after annealing or oxidation with laser raman spectroscopy
1990 ◽
Vol 19
(5)
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pp. 407-411
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1993 ◽
Vol 80-81
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pp. 1489-1493
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2000 ◽
pp. 177-195
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1992 ◽
Vol 134
(1)
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pp. 151-167
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1984 ◽
Vol 49
(2)
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pp. 157-159
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Keyword(s):