Fabrication of high-aspect-ratio electrode array by combining UV-LIGA with micro electro-discharge machining

2008 ◽  
Vol 15 (4) ◽  
pp. 519-525 ◽  
Author(s):  
Yang-Yang Hu ◽  
D. Zhu ◽  
N. S. Qu ◽  
Y. B. Zeng ◽  
P. M. Ming
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Electrode Array ◽  
Electro Discharge Machining

scholarly journals Sea of Electrodes Array (SEA): Extremely Dense and High-Count Silicon-Based Electrode Array Technology for High-Resolution High-Bandwidth Interfacing with 3D Neural Structures

2021 ◽  
Author(s):  
Amin Sandoughsaz Zardini ◽  
Behnoush Rostami ◽  
Khalil Najafi ◽  
Vaughn L. Hetrick ◽  
Omar J. Ahmed
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Electrode Array ◽  
High Count ◽  
Array Technology ◽  
High Bandwidth ◽  
Length Width ◽  
Silicon Based ◽  
The Brain

AbstractIn this work, we propose a new silicon-based micro-fabrication technology to fabricate 3D high-density high-electrode-count neural micro-probe arrays scalable to thousands and even millions of individual electrodes with user-defined length, width, shape, and tip profile. This unique technology utilizes DRIE of ultra-high aspect-ratio holes in silicon and refilling them with multiple films to form thousands of individual needles with metal tips making up the “sea-of-electrodes” array (SEA). World-record density of 400 electrodes/mm2 in a 5184-needle array is achieved. The needles are ~0.5-1.2mm long, <20μm wide at the base, and <1μm at the tip. The silicon-based structure of these 3D array probes with sharp tips, makes them stiff enough and easily implantable in the brain to reach a targeted region without failing. Moreover, the high aspect ratio of these extremely fine needles reduces the tissue damage and improves the chronic stability. Functionality of the electrodes is investigated using acute in vivo recording in a rat barrel field cortex under isoflurane anesthesia.

scholarly journals High-aspect-ratio Neural Electrode Array Fabrication using Thermomigration Process

2012 ◽  
Vol 47 ◽  
pp. 574-577
Author(s):  
A.C. Peixoto ◽  
A.F. Silva ◽  
N.S. Dias ◽  
J.H. Correia
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Electrode Array ◽  
Neural Electrode ◽  
Array Fabrication

High-aspect-ratio, free-form patterning of carbon nanotube forests using micro-electro-discharge machining

2010 ◽  
Vol 19 (11) ◽  
pp. 1405-1410 ◽  
Author(s):  
Waqas Khalid ◽  
Mohamed Sultan Mohamed Ali ◽  
Masoud Dahmardeh ◽  
Yongho Choi ◽  
Parham Yaghoobi ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Free Form ◽  
Electro Discharge Machining ◽  
Carbon Nanotube Forests

Large Area, High Aspect Ratio Microelectrode Arrays

2003 ◽  
Vol 773 ◽  
Author(s):  
Charles D. Merritt ◽  
Paul L. Falkenstein ◽  
Brian L. Justus
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Glass Matrix ◽  
Microelectrode Arrays ◽  
Electrode Array ◽  
Electrode Spacing ◽  
Electrode Arrays ◽  
Large Area ◽  
Aspect Ratios ◽  
Highly Uniform

AbstractA method is described for the fabrication of arrays of conducting, high aspect-ratio microwires for use as electrodes. The electrode arrays are fabricated by electrochemical deposition of metals, including Ni, Pt, Ag, Au and Rh, in channel glass templates having parallel, uniform, hollow channels with diameters that range from sub-micrometer to over 100 micrometers. The metals completely fill the hollow channels, yielding highly uniform electrodes with aspect ratios on the order of 1000 or more. The glass template electrically insulates the electrodes from one another. The electrode array wafers are cut and polished to a thickness ranging from about 100 to 2000 micrometers. The overall surface area is as large as 1 square centimeter. Alternatively, the wafers can be partially etched with acid to remove some of the glass matrix surrounding the electrodes, exposing an array of bare, solid wire stubs. The high aspect ratio microelectrode arrays were initially fabricated in order to provide the electrical interface for an intraocular retinal prosthesis, but have additional applications including biological and chemical sensing. Arrays with different channel sizes, different electrode spacing (with pitch from approximately 3R to 20R, where R is the electrode radius), and different geometrical arrangement are presented.

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