Fabrication and characterization of MEMS piezoelectric synthetic jet actuators with bulk-micromachined PZT thick film
2014 ◽
Vol 21
(5)
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pp. 1053-1059
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Keyword(s):
2014 ◽
Vol 216
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pp. 207-213
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Keyword(s):
2008 ◽
pp. 25-32
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Keyword(s):
2007 ◽
Vol 78
(3-4)
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pp. 283-307
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