Stress analysis in new improved differential vertical comb capacitive micro accelerometer using SOI technology

Author(s):  
Manoj Kumar Dounkal ◽  
R. K. Bhan ◽  
Navin Kumar
1984 ◽  
Vol 45 (C1) ◽  
pp. C1-901-C1-904 ◽  
Author(s):  
C. Marinucci ◽  
L. Palladino ◽  
G. Pasotti ◽  
M. V. Ricci ◽  
G. Vécsey

2003 ◽  
Vol 100 (12) ◽  
pp. 1137-1149
Author(s):  
M. François

2006 ◽  
Vol 2006 (suppl_23_2006) ◽  
pp. 55-60 ◽  
Author(s):  
A. Kumar ◽  
U. Welzel ◽  
E. J. Mittemeijer
Keyword(s):  

2020 ◽  
Vol 8 (5) ◽  
pp. 194
Author(s):  
Mohammed Almaged ◽  
Mohanad N. Noaman ◽  
Ali K. Mahmood ◽  
Nashwan Z. Hero

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