Terahertz Absorption Characteristics of NiCr Film and Enhanced Absorption by Reactive Ion Etching in a Microbolometer Focal Plane Array

2013 ◽  
Vol 34 (7-8) ◽  
pp. 431-436 ◽  
Author(s):  
Jun Gou ◽  
Jun Wang ◽  
Weizhi Li ◽  
Huiling Tai ◽  
Deen Gu ◽  
...  
Keyword(s):  
Focal Plane ◽  
Reactive Ion Etching ◽  
Focal Plane Array ◽  
Ion Etching ◽  
Enhanced Absorption ◽  
Terahertz Absorption ◽  
Absorption Characteristics

IR imaging using a cantilever-based focal plane array fabricated by deep reactive ion etching technique

2007 ◽  
Vol 91 (5) ◽  
pp. 054109 ◽  
Author(s):  
Xin Wang ◽  
Shenglin Ma ◽  
Xiaomei Yu ◽  
Ming Liu ◽  
Xiaohua Liu ◽  
...  
Keyword(s):  
Focal Plane ◽  
Reactive Ion Etching ◽  
Focal Plane Array ◽  
Etching Technique ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Ir Imaging

Magnetron Reactive Ion Etching of GaAs and AIGaAs in CH4/H2/Ar Plasmas.

1996 ◽  
Author(s):  
George F. McLane ◽  
Paul Cooke ◽  
Robert P. Moerkirk
Keyword(s):  
Reactive Ion Etching ◽  
Ion Etching

Dual Band MWIR/LWIR Focal Plane Array Test Results

1999 ◽  
Author(s):  
A. Goldberg ◽  
S. Wang ◽  
M. Sundaram ◽  
P. Uppal ◽  
M. Winn ◽  
...  
Keyword(s):  
Focal Plane ◽  
Focal Plane Array ◽  
Dual Band ◽  
Test Results

Dual-Band Imaging of Military Targets Using a QWIP Focal Plane Array

2001 ◽  
Author(s):  
A. Goldberg ◽  
T. Fischer ◽  
S. Kennerly ◽  
S. Wang ◽  
M. Sundaram
Keyword(s):  
Focal Plane ◽  
Focal Plane Array ◽  
Dual Band

Staggered Row Focal Plane Array Analysis

1991 ◽  
Author(s):  
A. Register ◽  
A. Henshaw
Keyword(s):  
Focal Plane ◽  
Focal Plane Array ◽  
Array Analysis
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