An investigation of copper interconnect deposition bath ageing by electrochemical impedance spectroscopy

2007 ◽  
Vol 38 (4) ◽  
pp. 457-468 ◽  
Author(s):  
C. Gabrielli ◽  
P. Moçotéguy ◽  
H. Perrot ◽  
D. Nieto-Sanz ◽  
A. Zdunek
Keyword(s):  
Electrochemical Impedance Spectroscopy ◽  
Impedance Spectroscopy ◽  
Electrochemical Impedance ◽  
Copper Interconnect
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