A negative tone lift-off method for small metal holes using PMMA/SiO2 double layer

2021 ◽  
Vol 44 (4) ◽  
Author(s):  
J S Baek ◽  
D Lee
Keyword(s):  
Double Layer ◽  
Lift Off ◽  
Negative Tone

Differential coupling double-layer coil for eddy current testing with high lift-off

2021 ◽  
pp. 1-1
Author(s):  
Kefan Chen ◽  
Bin Gao ◽  
G.Y. Tian ◽  
Yupei Yang ◽  
Changrong Yang ◽  
...  
Keyword(s):  
Double Layer ◽  
Eddy Current ◽  
Eddy Current Testing ◽  
High Lift ◽  
Current Testing ◽  
Lift Off ◽  
Differential Coupling

Double layer lift-off nanofabrication controlled gaps of nanoelectrodes with sub-100 nm by nanoimprint lithography

2015 ◽  
Vol 26 (18) ◽  
pp. 185301 ◽  
Author(s):  
Shujie Wang ◽  
Qing Shi ◽  
Jing Chai ◽  
Ke Cheng ◽  
Zuliang Du
Keyword(s):  
Double Layer ◽  
Nanoimprint Lithography ◽  
Lift Off

Sub-10nm resolution after lift-off using HSQ/PMMA double layer resist

2013 ◽  
Vol 110 ◽  
pp. 123-125 ◽  
Author(s):  
Marcus Rommel ◽  
Bengt Nilsson ◽  
Piotr Jedrasik ◽  
Valentina Bonanni ◽  
Alexandre Dmitriev ◽  
...  
Keyword(s):  
Double Layer ◽  
Lift Off

A single layer negative tone lift-off photo resist for patterning a magnetron sputtered Ti/Pt/Au contact system and for solder bumps

2005 ◽  
Vol 78-79 ◽  
pp. 503-508 ◽  
Author(s):  
A. Voigt ◽  
M. Heinrich ◽  
K. Hauck ◽  
R. Mientus ◽  
G. Gruetzner ◽  
...  
Keyword(s):  
Single Layer ◽  
Contact System ◽  
Solder Bumps ◽  
Lift Off ◽  
Negative Tone

Double layer resist process scheme for metal lift-off with application in inductive heating of microstructures

2010 ◽  
Vol 87 (5-8) ◽  
pp. 1226-1228 ◽  
Author(s):  
L. Ouattara ◽  
M. Knutzen ◽  
S. Keller ◽  
M.F. Hansen ◽  
A. Boisen
Keyword(s):  
Double Layer ◽  
Inductive Heating ◽  
Process Scheme ◽  
Lift Off
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