Circular diaphragm-based MOEMS pressure sensor using ring resonator

2020 ◽  
Author(s):  
P. R. Yashaswini ◽  
N. Mamatha ◽  
P. C. Srikanth
Keyword(s):  
Pressure Sensor ◽  
Ring Resonator ◽  
Circular Diaphragm

Ring Resonator based MOEMS Pressure Sensor on Circular Sensing Layer

2019 ◽  
Vol 11 (0009-SPECIAL ISSUE) ◽  
pp. 1035-1042 ◽  
Author(s):  
Mamatha N ◽  
Rakshitha B.S ◽  
Chandra Shekar N ◽  
Chetan H ◽  
Suganya S ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Ring Resonator

A High Pressure Sensor with Circular Diaphragm Based on MEMS Technology

2011 ◽  
Vol 483 ◽  
pp. 206-211 ◽  
Author(s):  
Li Bo Zhao ◽  
Xu Dong Fang ◽  
Yu Long Zhao ◽  
Zhuang De Jiang ◽  
Yong Li
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Correct Choice ◽  
Excellent Performance ◽  
Piezoresistive Sensors ◽  
Mems Technology ◽  
Circular Diaphragm ◽  
The Difference ◽  
Mems Process ◽  
Different Thickness

A pressure sensor in the range of 25 MPa with circular diaphragm is designed and fabricated, and the calibration experiments prove its excellent performance, which also reflects the correct choice of design after analyzing the effect of diaphragm dimension, location and shapes of piezoresistors. Circular diaphragms of different thickness and diameters are simulated to meet the pressure requirement of 25 MPa. It also displays the advantage of piezoresistive sensors over others and the difference characteristics between different types of piezoresistive sensors. And then the effect of piezoresistor location is analyzed and simulated to attain high accuracy and sensitivity after the circular diaphragm chip is packaged with borosilicate glass ring. The whole fabrication process of the chip is inexpensive and compatible with standard MEMS process. The experimental results show the developed high pressure sensor with the sensitivity of 2.533 mV/MPa has excellent performance, such as linearity of 0.08%FS, hysteresis of 0.03%FS, accuracy of 0.11%FS and repeatability of 0.03%FS under high temperature of 200 °C.

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