Electron energy distribution functions in non-equilibrium H2 discharges. The role of superelastic collisions from electronically excited states

1994 ◽  
Vol 228 (6) ◽  
pp. 687-694 ◽  
Author(s):  
M. Capitelli ◽  
G. Colonna ◽  
K. Hassouni ◽  
A. Gicquel
Keyword(s):  
Energy Distribution ◽  
Excited States ◽  
Electron Energy ◽  
Distribution Functions ◽  
Electron Energy Distribution ◽  
Electronically Excited States ◽  
Electronically Excited ◽  
Energy Distribution Functions ◽  
Non Equilibrium

The role of radiative reabsorption on the electron energy distribution functions in H2/He plasma expansion through a tapered nozzle

2014 ◽  
Vol 21 (9) ◽  
pp. 093508 ◽  
Author(s):  
Giuliano D'Ammando ◽  
Mario Capitelli ◽  
Fabrizio Esposito ◽  
Annarita Laricchiuta ◽  
Lucia D. Pietanza ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Electron Energy ◽  
Distribution Functions ◽  
Electron Energy Distribution ◽  
Plasma Expansion ◽  
Energy Distribution Functions

Electron Energy Distribution Functions in RF Molecular Plasmas

1986 ◽  
Vol 68 ◽  
Author(s):  
M. Dilonardo ◽  
M. Capitelli ◽  
R. Winkler ◽  
J. Wilhelm
Keyword(s):  
Energy Distribution ◽  
Electron Energy ◽  
Effective Field ◽  
Distribution Functions ◽  
Electron Energy Distribution ◽  
Rf Plasmas ◽  
Isotropic Distribution ◽  
Wide Range ◽  
Energy Distribution Functions

AbstractElectron energy distribution functions in molecular rf plasmas (CO, SF6) have been calculated by numerically solving the time dependent Boltzmann equation in a wide range of field frequencies up to the establishment of the periodic state.Particular attention is given to the reduction of the modulation degree and phase shift with respect to the rf field of the isotropic distribution function and of some macroscopic quantities as a function of frequency.Time averages of distribution functions and of some macroscopic quantities are then compared with the corresponding results obtained by using the effective field approximation.Finally we discuss the role of the second kind collisions in affecting the results.

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