Processing and performance of tantalum nitride thin film resistor networks with ±50 ppm/°C TCR

1974 ◽  
Vol 13 (1) ◽  
pp. 18-19
Keyword(s):  
Thin Film ◽  
Tantalum Nitride ◽  
Film Resistor ◽  
Thin Film Resistor ◽  
Resistor Networks ◽  
And Performance ◽  
Tantalum Nitride Thin Film

scholarly journals Evaluation of Characteristics of a Tantalum-Nitride Thin Film Resistor on an AlN Submount.

2002 ◽  
Vol 68 (8) ◽  
pp. 1052-1056 ◽  
Author(s):  
Teruhisa AKASHI ◽  
Hideaki TAKEMORI ◽  
Tetsuya TOMOBE ◽  
Toshiaki KOIZUMI
Keyword(s):  
Thin Film ◽  
Tantalum Nitride ◽  
Film Resistor ◽  
Thin Film Resistor ◽  
Tantalum Nitride Thin Film

scholarly journals Surface scattering mechanisms of tantalum nitride thin film resistor

2014 ◽  
Vol 9 (1) ◽  
Author(s):  
Huey-Ru Chen ◽  
Ying-Chung Chen ◽  
Ting-Chang Chang ◽  
Kuan-Chang Chang ◽  
Tsung-Ming Tsai ◽  
...  
Keyword(s):  
Thin Film ◽  
Tantalum Nitride ◽  
Surface Scattering ◽  
Film Resistor ◽  
Thin Film Resistor ◽  
Scattering Mechanisms ◽  
Tantalum Nitride Thin Film

Radiofrequency characteristics of ionized sputtered tantalum nitride thin-film resistor in CMOS device

2017 ◽  
Vol 13 (3) ◽  
pp. 230-234 ◽  
Author(s):  
Woo Suk Sul ◽  
Soon Hyeong Kwon ◽  
Eunmi Choi ◽  
Yinhua Cui ◽  
Kang Won Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Tantalum Nitride ◽  
Film Resistor ◽  
Thin Film Resistor ◽  
Tantalum Nitride Thin Film
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