The effect of substrate temperature on the properties of d.c. reactive magnetron sputtered titanium oxide films

Thin Solid Films ◽

10.1016/0040-6090(93)90528-w ◽

1993 ◽

Vol 223 (2) ◽

pp. 242-247 ◽

Author(s):

Li-jian Meng ◽

M. Andritschky ◽

M.P. dos Santos

Keyword(s):

Substrate Temperature ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron ◽

Titanium Oxide Films

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The optical properties of titanium oxide films prepared by dc reactive magnetron sputtering

10.1117/12.668092 ◽

2006 ◽

Author(s):

Li-Jian Meng ◽

V. Teixeira ◽

H. N. Cui ◽

Frank Placido ◽

Z. Xu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Titanium Oxide Films

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A study of the optical properties of titanium oxide films prepared by dc reactive magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2005.10.012 ◽

2006 ◽

Vol 252 (22) ◽

pp. 7970-7974 ◽

Author(s):

Li-Jian Meng ◽

V. Teixeira ◽

H.N. Cui ◽

Frank Placido ◽

Z. Xu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Titanium Oxide Films

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DC reactive magnetron sputtering with Ar ion-beam assistance for titanium oxide films

Surface and Coatings Technology ◽

10.1016/s0257-8972(02)00286-4 ◽

2002 ◽

Vol 158-159 ◽

pp. 457-464 ◽

Author(s):

S.-H. Kim ◽

J.-H. Lee ◽

C.K. Hwangbo ◽

S.M. Lee

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Ion Beam ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Titanium Oxide Films

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Carbon-Doped Titanium Oxide Films by DC Reactive Magnetron Sputtering Using CO2 and O2 as Reactive Gas

Acta Metallurgica Sinica (English Letters) ◽

10.1007/s40195-014-0049-z ◽

2014 ◽

Vol 27 (2) ◽

pp. 239-244 ◽

Author(s):

Dong Xie ◽

Feng Wen ◽

Wenmao Yang ◽

Xueyuan Li ◽

Yongxiang Leng ◽

...

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Carbon Doped ◽

Dc Reactive Magnetron Sputtering ◽

Titanium Oxide Films ◽

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Investigations of titanium oxide films deposited by d.c. reactive magnetron sputtering in different sputtering pressures

Thin Solid Films ◽

10.1016/0040-6090(93)90200-9 ◽

1993 ◽

Vol 226 (1) ◽

pp. 22-29 ◽

Author(s):

Li-Jian Meng ◽

M.P. dos Santos

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Titanium Oxide Films

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The effect of substrate temperature on the properties of sputtered titanium oxide films

Applied Surface Science ◽

10.1016/0169-4332(93)90664-w ◽

1993 ◽

Vol 65-66 ◽

pp. 235-239 ◽

Author(s):

Li-jian Meng ◽

M. Andritschky ◽

M.P. dos Santos

Keyword(s):

Substrate Temperature ◽

Titanium Oxide ◽

Oxide Films ◽

Titanium Oxide Films

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Study of the composition of titanium oxide films deposited by reactive magnetron sputtering

Recent Contributions to Physics ◽

10.26577/rcph.2020.v74.i3.06 ◽

2020 ◽

Vol 74 (3) ◽

Author(s):

D. Aubakirova ◽

N. Yerdybaeva ◽

V. Pichugin

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Titanium Oxide Films

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The influence of oxygen partial pressure on the properties of DC reactive magnetron sputtered titanium oxide films

Applied Surface Science ◽

10.1016/0169-4332(93)90251-6 ◽

1993 ◽

Vol 68 (3) ◽

pp. 319-325 ◽

Author(s):

Li-Jian Meng ◽

M.P. dos Santos

Keyword(s):

Oxygen Partial Pressure ◽

Partial Pressure ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron ◽

Titanium Oxide Films

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Sputtered titanium oxide films for microcircuit applications

Microelectronics Reliability ◽

10.1016/0026-2714(65)90068-5 ◽

1965 ◽

Vol 4 (2) ◽

pp. 230

Keyword(s):

Titanium Oxide ◽

Oxide Films ◽

Titanium Oxide Films

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Mechanical and histological investigation of hydrothermally treated and untreated anodic titanium oxide films containing Ca and P

Journal of Biomedical Materials Research ◽

10.1002/jbm.820291118 ◽

1995 ◽

Vol 29 (11) ◽

pp. 1459-1468 ◽

Author(s):

H. Ishizawa ◽

M. Fujino ◽

M. Ogino

Keyword(s):

Titanium Oxide ◽

Oxide Films ◽

Histological Investigation ◽

Anodic Titanium Oxide ◽

Titanium Oxide Films

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