The influence of oxygen partial pressure on the properties of DC reactive magnetron sputtered titanium oxide films

Applied Surface Science ◽

10.1016/0169-4332(93)90251-6 ◽

1993 ◽

Vol 68 (3) ◽

pp. 319-325 ◽

Author(s):

Li-Jian Meng ◽

M.P. dos Santos

Keyword(s):

Oxygen Partial Pressure ◽

Partial Pressure ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron ◽

Titanium Oxide Films

Download Full-text

Effect of Oxygen Partial Pressure on the Stoichiometric Composition of Titanium Oxide Films during Magnetron Sputtering

Physics of the Solid State ◽

10.1134/s1063783421100061 ◽

2021 ◽

Author(s):

S. V. Bulyarskiy ◽

G. G. Gusarov ◽

D. A. Koiva ◽

G. A. Rudakov

Keyword(s):

Magnetron Sputtering ◽

Oxygen Partial Pressure ◽

Partial Pressure ◽

Titanium Oxide ◽

Oxide Films ◽

Stoichiometric Composition ◽

Effect Of Oxygen ◽

Titanium Oxide Films

Download Full-text

The optical properties of titanium oxide films prepared by dc reactive magnetron sputtering

10.1117/12.668092 ◽

2006 ◽

Author(s):

Li-Jian Meng ◽

V. Teixeira ◽

H. N. Cui ◽

Frank Placido ◽

Z. Xu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Titanium Oxide Films

Download Full-text

A study of the optical properties of titanium oxide films prepared by dc reactive magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2005.10.012 ◽

2006 ◽

Vol 252 (22) ◽

pp. 7970-7974 ◽

Author(s):

Li-Jian Meng ◽

V. Teixeira ◽

H.N. Cui ◽

Frank Placido ◽

Z. Xu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Titanium Oxide Films

Download Full-text

DC reactive magnetron sputtering with Ar ion-beam assistance for titanium oxide films

Surface and Coatings Technology ◽

10.1016/s0257-8972(02)00286-4 ◽

2002 ◽

Vol 158-159 ◽

pp. 457-464 ◽

Author(s):

S.-H. Kim ◽

J.-H. Lee ◽

C.K. Hwangbo ◽

S.M. Lee

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Ion Beam ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Titanium Oxide Films

Download Full-text

Carbon-Doped Titanium Oxide Films by DC Reactive Magnetron Sputtering Using CO2 and O2 as Reactive Gas

Acta Metallurgica Sinica (English Letters) ◽

10.1007/s40195-014-0049-z ◽

2014 ◽

Vol 27 (2) ◽

pp. 239-244 ◽

Author(s):

Dong Xie ◽

Feng Wen ◽

Wenmao Yang ◽

Xueyuan Li ◽

Yongxiang Leng ◽

...

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Carbon Doped ◽

Dc Reactive Magnetron Sputtering ◽

Titanium Oxide Films ◽

Download Full-text

Investigations of titanium oxide films deposited by d.c. reactive magnetron sputtering in different sputtering pressures

Thin Solid Films ◽

10.1016/0040-6090(93)90200-9 ◽

1993 ◽

Vol 226 (1) ◽

pp. 22-29 ◽

Author(s):

Li-Jian Meng ◽

M.P. dos Santos

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Titanium Oxide Films

Download Full-text

Study of the composition of titanium oxide films deposited by reactive magnetron sputtering

Recent Contributions to Physics ◽

10.26577/rcph.2020.v74.i3.06 ◽

2020 ◽

Vol 74 (3) ◽

Author(s):

D. Aubakirova ◽

N. Yerdybaeva ◽

V. Pichugin

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Titanium Oxide Films

Download Full-text

Effect of oxygen partial pressure on the structural and optical properties of dc reactive magnetron sputtered molybdenum oxide films

Current Applied Physics ◽

10.1016/j.cap.2009.06.005 ◽

2010 ◽

Vol 10 (1) ◽

pp. 272-278 ◽

Author(s):

V. Nirupama ◽

K.R. Gunasekhar ◽

B. Sreedhar ◽

S. Uthanna

Keyword(s):

Optical Properties ◽

Oxygen Partial Pressure ◽

Partial Pressure ◽

Molybdenum Oxide ◽

Oxide Films ◽

Reactive Magnetron ◽

Structural And Optical Properties ◽

Effect Of Oxygen

Download Full-text

The effect of substrate temperature on the properties of d.c. reactive magnetron sputtered titanium oxide films

Thin Solid Films ◽

10.1016/0040-6090(93)90528-w ◽

1993 ◽

Vol 223 (2) ◽

pp. 242-247 ◽

Author(s):

Li-jian Meng ◽

M. Andritschky ◽

M.P. dos Santos

Keyword(s):

Substrate Temperature ◽

Titanium Oxide ◽

Oxide Films ◽

Reactive Magnetron ◽

Titanium Oxide Films

Download Full-text

Study of the effect of the oxygen partial pressure on the properties of rf reactive magnetron sputtered tin-doped indium oxide films

Applied Surface Science ◽

10.1016/s0169-4332(97)00224-9 ◽

1997 ◽

Vol 120 (3-4) ◽

pp. 243-249 ◽

Author(s):

Li-jian Meng ◽

M.P. dos Santos

Keyword(s):

Oxygen Partial Pressure ◽

Partial Pressure ◽

Indium Oxide ◽

Oxide Films ◽

Reactive Magnetron ◽

Indium Oxide Films

Download Full-text