DC reactive magnetron sputtering with Ar ion-beam assistance for titanium oxide films

2002 ◽  
Vol 158-159 ◽  
pp. 457-464 ◽  
Author(s):  
S.-H. Kim ◽  
J.-H. Lee ◽  
C.K. Hwangbo ◽  
S.M. Lee
Keyword(s):  
Magnetron Sputtering ◽  
Titanium Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
Titanium Oxide Films

scholarly journals Thermochromic properties of vanadium oxide films prepared by dc reactive magnetron sputtering

2008 ◽  
Vol 516 (7) ◽  
pp. 1484-1488 ◽  
Author(s):  
Hai-Ning Cui ◽  
Vasco Teixeira ◽  
Li-Jian Meng ◽  
Rong Wang ◽  
Jin-Yue Gao ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Vanadium Oxide ◽  
Oxide Films ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
Thermochromic Properties ◽  
Vanadium Oxide Films
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