Implementation of adaptive process control to a dry etching process

Vacuum ◽

10.1016/0042-207x(85)90497-x ◽

1985 ◽

Vol 35 (6) ◽

pp. 234

Keyword(s):

Process Control ◽

Dry Etching ◽

Etching Process ◽

Adaptive Process ◽

Adaptive Process Control

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Implementation of adaptive process control to a dry etching process

Journal of Vacuum Science and Technology ◽

10.1116/1.571534 ◽

1982 ◽

Vol 20 (4) ◽

pp. 1027-1030 ◽

Author(s):

F. J. Bresnock ◽

Th. Stumpf

Keyword(s):

Process Control ◽

Dry Etching ◽

Etching Process ◽

Adaptive Process ◽

Adaptive Process Control

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A Neural Pattern Analyzer for Adaptive Process Control

1991 American Control Conference ◽

10.23919/acc.1991.4791911 ◽

1991 ◽

Author(s):

D. J. Cooper ◽

L. Megan ◽

R. F. Hinde

Keyword(s):

Process Control ◽

Adaptive Process ◽

Adaptive Process Control

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Integration of adaptive process control with computational simulation for spin-forming

10.2172/657365 ◽

1998 ◽

Author(s):

P. J., LLNL Raboin

Keyword(s):

Process Control ◽

Computational Simulation ◽

Adaptive Process ◽

Adaptive Process Control

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Direct and Indirect Adaptive Process Control

Process Control for Sheet-Metal Stamping - Advances in Industrial Control ◽

10.1007/978-1-4471-6284-1_8 ◽

2013 ◽

pp. 109-131

Author(s):

Yongseob Lim ◽

Ravinder Venugopal ◽

A Galip Ulsoy

Keyword(s):

Process Control ◽

Adaptive Process ◽

Adaptive Process Control

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Adaptive process control of wire and arc additive manufacturing for fabricating complex-shaped components

The International Journal of Advanced Manufacturing Technology ◽

10.1007/s00170-018-1590-0 ◽

2018 ◽

Vol 96 (1-4) ◽

pp. 871-879 ◽

Author(s):

Fang Li ◽

Shujun Chen ◽

Zhaoyang Wu ◽

Zhihong Yan

Keyword(s):

Additive Manufacturing ◽

Process Control ◽

Adaptive Process ◽

Adaptive Process Control

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Adaptive process control based on a self-learning mechanism in autonomous manufacturing systems

The International Journal of Advanced Manufacturing Technology ◽

10.1007/s00170-012-4453-0 ◽

2012 ◽

Vol 66 (9-12) ◽

pp. 1725-1743 ◽

Author(s):

Seid Žapčević ◽

Peter Butala

Keyword(s):

Process Control ◽

Manufacturing Systems ◽

Learning Mechanism ◽

Adaptive Process ◽

Adaptive Process Control ◽

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Multilevel adaptive process control of acquisition and post-processing of computed radiographic images in picture archiving and communication system environment

Computerized Medical Imaging and Graphics ◽

10.1016/s0895-6111(98)00006-8 ◽

1998 ◽

Vol 22 (1) ◽

pp. 31-40 ◽

Author(s):

Jianguo Zhang ◽

H.K. Huang

Keyword(s):

Process Control ◽

Communication System ◽

Post Processing ◽

Radiographic Images ◽

System Environment ◽

Adaptive Process ◽

Picture Archiving ◽

Adaptive Process Control ◽

Picture Archiving And Communication

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Adaptive process control using biologic paradigms

Proceedings Electronic Technology Directions to the Year 2000 ◽

10.1109/etd.1995.403481 ◽

2002 ◽

Author(s):

C.L. Karr

Keyword(s):

Process Control ◽

Adaptive Process ◽

Adaptive Process Control

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Robot guided bolt tensioning tool with adaptive process control for the automated assembly of wind turbine rotor blade bearings

Production Engineering ◽

10.1007/s11740-014-0557-8 ◽

2014 ◽

Vol 8 (6) ◽

pp. 755-764 ◽

Author(s):

Rainer Müller ◽

Leenhard Hörauf ◽

Matthias Vette ◽

Javier Lopez San Martin ◽

Aitor Alzaga ◽

...

Keyword(s):

Process Control ◽

Wind Turbine ◽

Rotor Blade ◽

Turbine Rotor ◽

Automated Assembly ◽

Turbine Rotor Blade ◽

Adaptive Process ◽

Adaptive Process Control ◽

Wind Turbine Rotor

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Adaptive process control using biological paradigms

Journal of Network and Computer Applications ◽

10.1006/jnca.1996.0004 ◽

1996 ◽

Vol 19 (1) ◽

pp. 21-44 ◽

Author(s):

Charles L. Karr

Keyword(s):

Process Control ◽

Adaptive Process ◽

Adaptive Process Control

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