Implementation of adaptive process control to a dry etching process

1982 ◽  
Vol 20 (4) ◽  
pp. 1027-1030 ◽  
Author(s):  
F. J. Bresnock ◽  
Th. Stumpf
2014 ◽  
Vol 8 (6) ◽  
pp. 755-764 ◽  
Author(s):  
Rainer Müller ◽  
Leenhard Hörauf ◽  
Matthias Vette ◽  
Javier Lopez San Martin ◽  
Aitor Alzaga ◽  
...  

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