Enhanced Vacuum Ultraviolet and X-ray Radiation From Electrically Controlled KrF Laser Plasma

1994 ◽  
pp. 241-244
Author(s):  
T. Yagi ◽  
H. Kusama
Keyword(s):  
Laser Plasma ◽  
Vacuum Ultraviolet ◽  
X Ray ◽  
Krf Laser

Calibration Of A KrF Laser-Plasma Source For X-Ray Microscopy Applications

1988 ◽  
Author(s):  
I C. E. Turcu ◽  
F O'Neill ◽  
U Zammit ◽  
Y Al-Hadithi ◽  
R W. Eason ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
X Ray ◽  
Krf Laser

Temperature and x‐ray intensity scaling in KrF laser plasma interaction

1986 ◽  
Vol 48 (2) ◽  
pp. 103-105 ◽  
Author(s):  
P. D. Gupta ◽  
R. Popil ◽  
R. Fedosejevs ◽  
A. A. Offenberger ◽  
D. Salzmann ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Interaction ◽  
X Ray ◽  
Laser Plasma Interaction ◽  
Krf Laser ◽  
Intensity Scaling

Measurement of KrF-laser–plasma x-ray radiation from targets with various atomic numbers

1987 ◽  
Vol 35 (9) ◽  
pp. 3874-3882 ◽  
Author(s):  
R. Popil ◽  
P. D. Gupta ◽  
R. Fedosejevs ◽  
A. A. Offenberger
Keyword(s):  
Laser Plasma ◽  
X Ray ◽  
Krf Laser

100-Hz KrF laser plasma x-ray source

1991 ◽  
Author(s):  
I. C. Edmond Turcu ◽  
Malcolm C. Gower ◽  
C. J. Reason ◽  
P. Huntington ◽  
M. Schulz ◽  
...  
Keyword(s):  
Laser Plasma ◽  
X Ray ◽  
Krf Laser

High repetition rate KrF laser plasma x-ray source for microlithography

1992 ◽  
Vol 17 (1-4) ◽  
pp. 219-222
Author(s):  
F. Bijkerk ◽  
E. Louis ◽  
E.C.I. Turcu ◽  
G.J. Tallents
Keyword(s):  
Laser Plasma ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
X Ray ◽  
High Repetition ◽  
Krf Laser

X-ray lithography using a KrF laser–plasma source

1986 ◽  
Vol 25 (4) ◽  
pp. 464 ◽  
Author(s):  
F. O'Neill ◽  
M. C. Gower ◽  
I. C. E. Turcu ◽  
Y. Owadano
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
X Ray ◽  
Krf Laser

X-ray lithography using a KrF laser-plasma source

1986 ◽  
Author(s):  
F. O’Neill ◽  
M. C. Gower ◽  
I. C. E. Turcu ◽  
Y. Owadano ◽  
R. Feder
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
X Ray ◽  
Krf Laser
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