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Measurement of KrF-laser–plasma x-ray radiation from targets with various atomic numbers
Physical Review A
◽
10.1103/physreva.35.3874
◽
1987
◽
Vol 35
(9)
◽
pp. 3874-3882
◽
Cited By ~ 29
Author(s):
R. Popil
◽
P. D. Gupta
◽
R. Fedosejevs
◽
A. A. Offenberger
Keyword(s):
Laser Plasma
◽
X Ray
◽
Krf Laser
Download Full-text
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References
Calibration Of A KrF Laser-Plasma Source For X-Ray Microscopy Applications
10.1117/12.965039
◽
1988
◽
Cited By ~ 5
Author(s):
I C. E. Turcu
◽
F O'Neill
◽
U Zammit
◽
Y Al-Hadithi
◽
R W. Eason
◽
...
Keyword(s):
Laser Plasma
◽
Plasma Source
◽
X Ray
◽
Krf Laser
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Enhanced Vacuum Ultraviolet and X-ray Radiation From Electrically Controlled KrF Laser Plasma
Laser and Ion Beam Modification of Materials
◽
10.1016/b978-0-444-81994-9.50054-3
◽
1994
◽
pp. 241-244
Author(s):
T. Yagi
◽
H. Kusama
Keyword(s):
Laser Plasma
◽
Vacuum Ultraviolet
◽
X Ray
◽
Krf Laser
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Temperature and x‐ray intensity scaling in KrF laser plasma interaction
Applied Physics Letters
◽
10.1063/1.96966
◽
1986
◽
Vol 48
(2)
◽
pp. 103-105
◽
Cited By ~ 17
Author(s):
P. D. Gupta
◽
R. Popil
◽
R. Fedosejevs
◽
A. A. Offenberger
◽
D. Salzmann
◽
...
Keyword(s):
Laser Plasma
◽
Plasma Interaction
◽
X Ray
◽
Laser Plasma Interaction
◽
Krf Laser
◽
Intensity Scaling
Download Full-text
Particle emission debris from a KrF laser–plasma x‐ray source
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.580070
◽
1996
◽
Vol 14
(4)
◽
pp. 1973-1980
◽
Cited By ~ 16
Author(s):
R. Bobkowski
◽
R. Fedosejevs
Keyword(s):
Laser Plasma
◽
Particle Emission
◽
X Ray
◽
Krf Laser
Download Full-text
Performance optimization of a high-repetition-rate KrF laser plasma x-ray source for microlithography
Journal of X-Ray Science and Technology
◽
10.1016/0895-3996(92)90005-5
◽
1992
◽
Vol 3
(2)
◽
pp. 133-151
◽
Cited By ~ 23
Author(s):
F Bijkerk
Keyword(s):
Laser Plasma
◽
Performance Optimization
◽
Repetition Rate
◽
High Repetition Rate
◽
X Ray
◽
High Repetition
◽
Krf Laser
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High average power KrF laser-plasma x-ray source for lithography at 1nm wavelength
17th Congress of the International Commission for Optics: Optics for Science and New Technology
◽
10.1117/12.2316271
◽
1996
◽
Author(s):
I. C. E. Turcua
Keyword(s):
Laser Plasma
◽
Average Power
◽
High Average Power
◽
X Ray
◽
Krf Laser
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100-Hz KrF laser plasma x-ray source
10.1117/12.46951
◽
1991
◽
Cited By ~ 4
Author(s):
I. C. Edmond Turcu
◽
Malcolm C. Gower
◽
C. J. Reason
◽
P. Huntington
◽
M. Schulz
◽
...
Keyword(s):
Laser Plasma
◽
X Ray
◽
Krf Laser
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High repetition rate KrF laser plasma x-ray source for microlithography
Microelectronic Engineering
◽
10.1016/0167-9317(92)90045-s
◽
1992
◽
Vol 17
(1-4)
◽
pp. 219-222
Author(s):
F. Bijkerk
◽
E. Louis
◽
E.C.I. Turcu
◽
G.J. Tallents
Keyword(s):
Laser Plasma
◽
Repetition Rate
◽
High Repetition Rate
◽
X Ray
◽
High Repetition
◽
Krf Laser
Download Full-text
X-ray lithography using a KrF laser–plasma source
Applied Optics
◽
10.1364/ao.25.000464
◽
1986
◽
Vol 25
(4)
◽
pp. 464
◽
Cited By ~ 20
Author(s):
F. O'Neill
◽
M. C. Gower
◽
I. C. E. Turcu
◽
Y. Owadano
Keyword(s):
Laser Plasma
◽
Plasma Source
◽
X Ray
◽
Krf Laser
Download Full-text
X-ray lithography using a KrF laser-plasma source
Conference on Lasers and Electro-Optics
◽
10.1364/cleo.1986.tus1
◽
1986
◽
Author(s):
F. O’Neill
◽
M. C. Gower
◽
I. C. E. Turcu
◽
Y. Owadano
◽
R. Feder
Keyword(s):
Laser Plasma
◽
Plasma Source
◽
X Ray
◽
Krf Laser
Download Full-text
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