The next generation of semiconductor process and device modeling codes will require 3-D
mesh capabilities including moving volume and surface grids, adaptive mesh refinement and
adaptive mesh smoothing. To illustrate the value of these techniques, a time dependent process
simulation model was constructed using analytic functions to return time dependent
dopant concentration and time dependent SiO2 volume and surface velocities. Adaptive mesh
refinement and adaptive mesh smoothing techniques were used to resolve the moving boron
dopant diffusion front in the Si substrate. The adaptive mesh smoothing technique involves
minimizing the L2 norm of the gradient of the error between the true dopant concentration
and the piecewise linear approximation over the tetrahedral mesh thus assuring that the mesh
is optimal for representing evolving solution gradients. Also implemented is constrained
boundary smoothing, wherein the moving SiO2/Si interface is represented by moving nodes
that correctly track the interface motion, and which use their remaining degrees of freedom to
minimize the aforementioned error norm. Thus, optimal tetrahedral shape and alignment is
obtained even in the neighborhood of a moving boundary. If desired, a topological “reconnection”
step maintains a Delaunay mesh at all times. The combination of adaptive refinement,
adaptive smoothing, and mesh reconnection gives excellent front tracking, feature resolution,
and grid quality for finite volume/finite element computation.