Improvement of principal component analysis modeling for plasma etch processes through discrete wavelet transform and automatic variable selection

2016 ◽  
Vol 94 ◽  
pp. 362-369 ◽  
Author(s):  
Daegeun Ha ◽  
Damdae Park ◽  
Junmo Koo ◽  
Kye Hyun Baek ◽  
Chonghun Han
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