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Annealing effects on the optical and structural properties of Si thin films deposited by ion beam sputtering technique
Optik
◽
10.1016/j.ijleo.2018.12.100
◽
2019
◽
Vol 181
◽
pp. 695-702
Author(s):
Shida Li
◽
Huasong Liu
◽
Yugang Jiang
◽
Jiahuan He
◽
Lishuan Wang
◽
...
Keyword(s):
Thin Films
◽
Structural Properties
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Annealing Effects
Download Full-text
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References
Annealing effects on optical and structural properties of TiO2 thin films deposited by ion beam sputtering
Tenth International Conference on Thin Film Physics and Applications (TFPA 2019)
◽
10.1117/12.2539044
◽
2019
◽
Author(s):
Yugang Jiang
◽
jiahuan He
◽
Lishuan Wang
◽
Shida Li
◽
Dan Chen
◽
...
Keyword(s):
Thin Films
◽
Structural Properties
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Tio2 Thin Films
◽
Beam Sputtering
◽
Annealing Effects
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Optical and structural properties of YF 3 thin films prepared by ion-assisted deposition or ion beam sputtering techniques
10.1117/12.192090
◽
1994
◽
Cited By ~ 7
Author(s):
Jean-Yves Robic
◽
Viviane Muffato
◽
Patrick Chaton
◽
Michel Ida
◽
M. Berger
Keyword(s):
Thin Films
◽
Structural Properties
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
Preparation of thin films of (Tb,Dy)Fe2 giant magnetostrictive alloy by ion beam sputtering process.
Journal of Advanced Science
◽
10.2978/jsas.8.27
◽
1996
◽
Vol 8
(1/2)
◽
pp. 27-28
Author(s):
Mitsuhiro WADA
◽
Yoshihito MATSUMURA
◽
Hirohisa UCHIDA
◽
Haru-Hisa UCHIDA
◽
Hideo KANEKO
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
EFFECT OF DEPOSITION CONDITION ON THE FERROELECTRIC PROPERTIES OF BARIUM SODIUM NIOBATE THIN FILMS DEPOSITED BY ION BEAM SPUTTERING
Integrated Ferroelectrics
◽
10.1080/10584580600657484
◽
2006
◽
Vol 80
(1)
◽
pp. 163-172
Author(s):
JUNHUI LOU
◽
HEE YOUNG LEE
◽
JEONG-JOO KIM
◽
SANG-HEE CHO
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ferroelectric Properties
◽
Deposition Condition
◽
Sodium Niobate
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
Effects of oxygen partial pressure on the crystallographic structure of Mn-Zn ferrite thin films deposited by ion beam sputtering
Surface and Coatings Technology
◽
10.1016/0257-8972(94)90174-0
◽
1994
◽
Vol 68-69
◽
pp. 279-284
◽
Cited By ~ 3
Author(s):
Hae Seok Cho
◽
Sang Ki Ha
◽
Hyeong Joon Kim
Keyword(s):
Thin Films
◽
Oxygen Partial Pressure
◽
Partial Pressure
◽
Ion Beam
◽
Crystallographic Structure
◽
Ion Beam Sputtering
◽
Zn Ferrite
◽
Beam Sputtering
◽
Ferrite Thin Films
Download Full-text
Thickness effect on structural properties of post annealed barium hexaferrite films deposited by ion beam sputtering
Journal of Magnetism and Magnetic Materials
◽
10.1016/j.jmmm.2021.167786
◽
2021
◽
Vol 527
◽
pp. 167786
Author(s):
V.G. Kostishin
◽
A.Yu. Mironovich
◽
R.I. Shakirzyanov
◽
I.M. Isaev
◽
A.V. Timofeev
◽
...
Keyword(s):
Structural Properties
◽
Ion Beam
◽
Barium Hexaferrite
◽
Thickness Effect
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
Fabrication of the Ln-Ba-Cu-O thin films by ion beam sputtering.
Shinku
◽
10.3131/jvsj.32.259
◽
1989
◽
Vol 32
(3)
◽
pp. 259-262
Author(s):
Tetsuro TAJIMA
◽
Hajime KUWAHARA
◽
Kohei OTANI
◽
Tsutom YOTSUYA
◽
Yoshihiko SUZUKI
◽
...
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
Effect of thin films prepared by reactive ion beam sputtering on vacuum breakdown voltage.
Shinku
◽
10.3131/jvsj.33.346
◽
1990
◽
Vol 33
(3)
◽
pp. 346-348
Author(s):
Shinichi KOBAYASHI
◽
Da Xiang SUN
Keyword(s):
Thin Films
◽
Breakdown Voltage
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Vacuum Breakdown
◽
Beam Sputtering
Download Full-text
Annealing effects on self-assembled Ge/Si (100) islands prepared by ion beam sputtering deposition
Materials Technology
◽
10.1179/175355511x13240279340840
◽
2012
◽
Vol 27
(1)
◽
pp. 133-135
◽
Cited By ~ 5
Author(s):
J Yang
◽
C Wang
◽
D P Tao
◽
Y Yang
Keyword(s):
Ion Beam
◽
Ion Beam Sputtering
◽
Sputtering Deposition
◽
Beam Sputtering
◽
Annealing Effects
◽
Self Assembled
Download Full-text
Growth of Thin Films by UHV ION Beam Sputtering Deposition Technique
Erosion and Growth of Solids Stimulated by Atom and Ion Beams
◽
10.1007/978-94-009-4422-0_30
◽
1986
◽
pp. 457-460
◽
Cited By ~ 1
Author(s):
C. Pellet
◽
C. Schwebel
◽
F. Meyer
◽
G. Gautherin
Keyword(s):
Thin Films
◽
Ion Beam
◽
Deposition Technique
◽
Ion Beam Sputtering
◽
Sputtering Deposition
◽
Beam Sputtering
Download Full-text
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