A high-speed exposure method for digital micromirror device based scanning maskless lithography system

Optik ◽  
2019 ◽  
Vol 185 ◽  
pp. 1036-1044 ◽  
Author(s):  
Chao Peng ◽  
Zezhou Zhang ◽  
Jianxiao Zou ◽  
Wenming Chi
Keyword(s):  
High Speed ◽  
Maskless Lithography ◽  
Digital Micromirror Device ◽  
Exposure Method ◽  
Lithography System

Fabrication of passive micromixer using a digital micromirror device-based maskless lithography system

2014 ◽  
Vol 15 (7) ◽  
pp. 1417-1422 ◽  
Author(s):  
Yong-Kyu Cho ◽  
Tae-Heon Han ◽  
Seok-Jae Ha ◽  
Jung-Won Lee ◽  
Jong-Su Kim ◽  
...  
Keyword(s):  
Maskless Lithography ◽  
Digital Micromirror Device ◽  
Passive Micromixer ◽  
Lithography System

High-speed playback of spatiotemporal division multiplexing holographic 3D video stored in a solid-state drive using a digital micromirror device

2021 ◽  
Vol 19 (9) ◽  
pp. 093301
Author(s):  
Kohei Suzuki ◽  
Minori Tao ◽  
Yuki Maeda ◽  
Hirotaka Nakayama ◽  
Ren Noguchi ◽  
...  
Keyword(s):  
Solid State ◽  
High Speed ◽  
3D Video ◽  
Digital Micromirror Device ◽  
Solid State Drive

Optofluidic Maskless Lithography System

2007 ◽  
Author(s):  
Su E. Chung ◽  
Wook Park ◽  
Hyunsung Park ◽  
Kyoungsik Yu ◽  
Namkyoo Park ◽  
...  
Keyword(s):  
Maskless Lithography ◽  
Lithography System

Patterning of SU-8 resist with digital micromirror device (DMD) maskless lithography

2009 ◽  
Author(s):  
Tao Wang ◽  
Marzia Quaglio ◽  
Fabrizio Pirri ◽  
Yang-Chun Cheng ◽  
David Busacker ◽  
...  
Keyword(s):  
Maskless Lithography ◽  
Digital Micromirror Device

High-speed optical processing using digital micromirror device

2014 ◽  
Author(s):  
Tien-Hsin Chao ◽  
Thomas Lu ◽  
Brian Walker ◽  
George Reyes
Keyword(s):  
High Speed ◽  
Digital Micromirror Device ◽  
Optical Processing
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