digital micromirror device
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2022 ◽  
Vol 151 ◽  
pp. 106889
Author(s):  
Wen Chen ◽  
Ming-Jie Sun ◽  
Wei-Jie Deng ◽  
Hai-Xiang Hu ◽  
Li-Jing Li ◽  
...  

Micromachines ◽  
2021 ◽  
Vol 13 (1) ◽  
pp. 49
Author(s):  
Dhanesh G. Kasi ◽  
Mees N. S. de Graaf ◽  
Paul A. Motreuil-Ragot ◽  
Jean-Phillipe M. S. Frimat ◽  
Michel D. Ferrari ◽  
...  

Organ-on-a-chip (OoC) and microfluidic devices are conventionally produced using microfabrication procedures that require cleanrooms, silicon wafers, and photomasks. The prototyping stage often requires multiple iterations of design steps. A simplified prototyping process could therefore offer major advantages. Here, we describe a rapid and cleanroom-free microfabrication method using maskless photolithography. The approach utilizes a commercial digital micromirror device (DMD)-based setup using 375 nm UV light for backside exposure of an epoxy-based negative photoresist (SU-8) on glass coverslips. We show that microstructures of various geometries and dimensions, microgrooves, and microchannels of different heights can be fabricated. New SU-8 molds and soft lithography-based polydimethylsiloxane (PDMS) chips can thus be produced within hours. We further show that backside UV exposure and grayscale photolithography allow structures of different heights or structures with height gradients to be developed using a single-step fabrication process. Using this approach: (1) digital photomasks can be designed, projected, and quickly adjusted if needed; and (2) SU-8 molds can be fabricated without cleanroom availability, which in turn (3) reduces microfabrication time and costs and (4) expedites prototyping of new OoC devices.


2021 ◽  
Vol 26 (11) ◽  
Author(s):  
Jialong Chen ◽  
Zhiqiang Fu ◽  
Bingxu Chen ◽  
Shih-Chi Chen

2021 ◽  
pp. 127595
Author(s):  
Qiansheng Wang ◽  
Haiyan Luo ◽  
Zhiwei Li ◽  
Hailiang Shi ◽  
Yunfei Bai ◽  
...  

2021 ◽  
Vol 60 (29) ◽  
pp. 9101
Author(s):  
Yingchao Li ◽  
Wenyu Jiang ◽  
Chunsheng Li ◽  
Zhenyu Ma ◽  
Yuqing Yang ◽  
...  

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