Micron-scale channel formation by the release and bond-back of pre-stressed thin films: A finite element analysis

2010 ◽  
Vol 58 (4) ◽  
pp. 447-465 ◽  
Author(s):  
R.K. Annabattula ◽  
W.T.S. Huck ◽  
P.R. Onck
2008 ◽  
Vol 75 (14) ◽  
pp. 4217-4233 ◽  
Author(s):  
Phuong Tran ◽  
Soma Sekhar V. Kandula ◽  
Philippe H. Geubelle ◽  
Nancy R. Sottos

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