Time-resolved cavity ringdown spectroscopy on nanoparticle generation in a SiH4–H2 VHF plasma
2008 ◽
Vol 354
(19-25)
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pp. 2096-2099
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Keyword(s):
2012 ◽
Vol 83
(4)
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pp. 043110
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2008 ◽
Vol 47
(9)
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pp. 7032-7043
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1998 ◽
Vol 109
(23)
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pp. 10201-10206
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2010 ◽
Vol 491
(4-6)
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pp. 123-131
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2003 ◽
Vol 107
(39)
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pp. 7704-7712
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2001 ◽
Vol 171
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pp. 163-190
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Vol 8
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pp. 539-551
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1996 ◽
Vol 259
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pp. 233-236
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