A thermal-energy method for calculating thermoelastic damping in micromechanical resonators

2009 ◽  
Vol 322 (4-5) ◽  
pp. 870-882 ◽  
Author(s):  
Zhili Hao ◽  
Yang Xu ◽  
Shiva Krishna Durgam
Keyword(s):  
Thermal Energy ◽  
Energy Method ◽  
Thermoelastic Damping ◽  
Micromechanical Resonators

A Numerical Model for Thermoelastic Damping in Micromechanical Resonators Made From Anisotropic Materials

2008 ◽  
Author(s):  
Yang Xu ◽  
Zhili Hao
Keyword(s):  
Numerical Model ◽  
Thermal Energy ◽  
Single Crystal Silicon ◽  
Mathematical Expression ◽  
Transient Heat Conduction ◽  
Anisotropic Materials ◽  
Thermoelastic Damping ◽  
Crystal Silicon ◽  
Micromechanical Resonators ◽  
Complex Structural

This paper presents a numerical model for thermoelastic damping (TED) in micromechanical resonators made from anisotropic materials, such as single crystal silicon. It is built upon a thermal-energy method, in which TED is interpreted as the generation of thermal energy per cycle of vibration and consequently the mathematical expression for TED is derived from the linear thermoelastic governing equations for anisotropic media. This numerical model consists of two sequential numerical simulations: elastic vibrations and transient heat conduction, and is developed in the ANSYS/Multiphysics, giving rise to the numerical value for the derived expression for TED and further the quality factor related to TED (QTED) in a micromechanical resonator with any complex structural geometry. Through comparison with experimental data in the literature, the validity of the presented numerical model is demonstrated.

Effect of Axial Prestress on Thermoelastic Damping in Micromechanical Beam Resonators

2011 ◽  
Author(s):  
Wenting Gu ◽  
Peng Cheng ◽  
Julie Hao
Keyword(s):  
Thin Films ◽  
Theoretical Model ◽  
Quality Factor ◽  
Explicit Expression ◽  
Thermal Energy ◽  
Energy Method ◽  
Strain Distribution ◽  
Elastic Strain ◽  
Thermoelastic Damping ◽  
Beam Resonator

Axial prestress is built into those micromechanical beam resonators made of deposited thin films. This prestressaffects elastic strain distribution in a beam resonator and thus has the potential of changing its thermoelastic damping (TED). In this paper, a theoretical model of TED in a micromechanical beam resonator with axial prestressis developed to study the effect of axial prestress on TED in such resonators. This theoretical model is built upon a thermal-energy method and therefore TED is calculated as the generated thermal energy during one cycle of vibration. An explicit expression for the QTED, the Quality factor due to TED, is obtained from this developed model. As a result, this work suggests that, for a beam resonator with axial prestress, its QTEDincreases with tensile prestressand decreases with compressive prestress.

Thermoelastic damping in GaAs micromechanical resonators

2008 ◽  
Vol 5 (9) ◽  
pp. 2920-2922 ◽  
Author(s):  
Hajime Okamoto ◽  
Daisuke Ito ◽  
Koji Onomitsu ◽  
Hiroshi Yamaguchi
Keyword(s):  
Thermoelastic Damping ◽  
Micromechanical Resonators

Advanced thermal energy method for finishing precision parts

2021 ◽  
pp. 527-575
Author(s):  
Sergiy Plankovskyy ◽  
Viktor Popov ◽  
Olga Shypul ◽  
Yevgen Tsegelnyk ◽  
Oleg Tryfonov ◽  
...  
Keyword(s):  
Thermal Energy ◽  
Energy Method

Thermoelastic damping in micromechanical resonators

2009 ◽  
Vol 95 (6) ◽  
pp. 061903 ◽  
Author(s):  
Thomas H. Metcalf ◽  
Bradford B. Pate ◽  
Douglas M. Photiadis ◽  
Brian H. Houston
Keyword(s):  
Thermoelastic Damping ◽  
Micromechanical Resonators

Amplification of Heat Transfer by Shock Waves for Thermal Energy Method

2021 ◽  
pp. 577-587
Author(s):  
Sergiy Plankovskyy ◽  
Olga Shypul ◽  
Yevgen Tsegelnyk ◽  
Alexander Pankratov ◽  
Tatiana Romanova
Keyword(s):  
Heat Transfer ◽  
Shock Waves ◽  
Thermal Energy ◽  
Energy Method
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