Strain mapping of silicon carbon suspended membranes
Gerard Colston
◽
Oliver Newell
◽
Stephen D. Rhead
◽
Vishal A. Shah
◽
Maksym Myronov
2001 ◽
Vol 11
(PR3)
◽
pp. Pr3-691-Pr3-702
2015 ◽
Vol 30
(4)
◽
pp. 351
◽
HUANG Yan-Hua
◽
HAN Xiang
◽
CHEN Hui-Xin
◽
CHEN Song-Yan
◽
YANG Yong