Coaxial displacement sensor using a lateral shear interferometer with a phase grating

Measurement: Sensors ◽

10.1016/j.measen.2021.100084 ◽

2021 ◽

Vol 18 ◽

pp. 100084

Author(s):

M. Furuya ◽

E. Fujii ◽

H. Fujiwara

Keyword(s):

Displacement Sensor ◽

Lateral Shear ◽

Phase Grating ◽

Shear Interferometer

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Novel and simple reversed lateral shear interferometer with single-cube beam splitter and spatial Fourier transform for symmetric lens measurement

Proceedings of the The 1st International Conference on Computer Science and Engineering Technology Universitas Muria Kudus ◽

10.4108/eai.24-10-2018.2280615 ◽

2018 ◽

Author(s):

Jianfei Sun ◽

Cheok Lee ◽

Chee Ang ◽

Weijuan Qu Qu

Keyword(s):

Fourier Transform ◽

Beam Splitter ◽

Lateral Shear ◽

Cube Beam Splitter ◽

Shear Interferometer

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Anti-Vibration Characteristics of a Lateral Shear Interferometer for On-Machine Surface Measurement

Key Engineering Materials - Measurement Technology and Intelligent Instruments VI ◽

10.4028/0-87849-977-6.411 ◽

2005 ◽

pp. 411-416

Author(s):

X. Liu ◽

Y. Gao ◽

S. To ◽

Wing Bun Lee

Keyword(s):

Machine Surface ◽

Vibration Characteristics ◽

Surface Measurement ◽

Lateral Shear ◽

Shear Interferometer

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Study of a displacement sensor based on transmission varied-line-space phase grating

Optoelectronics Letters ◽

10.1007/s11801-008-7155-y ◽

2008 ◽

Vol 4 (3) ◽

pp. 217-222 ◽

Author(s):

Jing Zhou ◽

Min Ouyang ◽

Yan Shen ◽

Da-he Liu

Keyword(s):

Displacement Sensor ◽

Phase Grating ◽

Space Phase ◽

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Displacement sensor based on grating imaging with a cylindrical lens array and a phase grating

Optical Engineering ◽

10.1117/1.2753185 ◽

2007 ◽

Vol 46 (7) ◽

pp. 073603 ◽

Author(s):

Toru Oka

Keyword(s):

Cylindrical Lens ◽

Displacement Sensor ◽

Phase Grating ◽

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Holographic lateral shear interferometer

Applied Optics ◽

10.1364/ao.15.002695 ◽

1976 ◽

Vol 15 (11) ◽

pp. 2695 ◽

Author(s):

D. Malacara ◽

S. Mallick

Keyword(s):

Lateral Shear ◽

Shear Interferometer

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Double Frequency Grating Lateral Shear Interferometer

Applied Optics ◽

10.1364/ao.12.002057 ◽

1973 ◽

Vol 12 (9) ◽

pp. 2057 ◽

Author(s):

J. C. Wyant

Keyword(s):

Lateral Shear ◽

Double Frequency ◽

Shear Interferometer

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Design and Fabrication of a Variable Frequency Grating and its application as a lateral-shear interferometer having a variable shear

Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing ◽

10.1364/fio.2004.fwt5 ◽

2004 ◽

Author(s):

R. P. Shukla ◽

N. C. Das ◽

Murty V. Mantravadi ◽

D. Cook ◽

M.D. Aggarwal

Keyword(s):

Variable Frequency ◽

Lateral Shear ◽

Variable Shear ◽

Shear Interferometer

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A holographic, radial and lateral shear interferometer

Optics Communications ◽

10.1016/0030-4018(74)90066-2 ◽

1974 ◽

Vol 12 (1) ◽

pp. 29-31 ◽

Author(s):

Jean Claude Fouéré ◽

Chandrasekhar Roychoudhuri

Keyword(s):

Lateral Shear ◽

Shear Interferometer

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Design and fabrication of a variable frequency grating and its application as a lateral-shear interferometer having a variable shear

Optics & Laser Technology ◽

10.1016/j.optlastec.2005.07.005 ◽

2007 ◽

Vol 39 (2) ◽

pp. 338-346 ◽

Author(s):

R.P. Shukla ◽

N.C. Das ◽

Murty V. Mantravadi ◽

D. Cook ◽

M.D. Aggarwal

Keyword(s):

Variable Frequency ◽

Lateral Shear ◽

Variable Shear ◽

Shear Interferometer

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Study of wavefront reconstruction based on four-wave lateral shear interferometer method

9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment ◽

10.1117/12.2506493 ◽

2019 ◽

Author(s):

Wenbo Wan ◽

Lihong Yang ◽

Junhong Su

Keyword(s):

Lateral Shear ◽

Wavefront Reconstruction ◽

Interferometer Method ◽

Shear Interferometer

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