Anti-Vibration Characteristics of a Lateral Shear Interferometer for On-Machine Surface Measurement

2005 ◽  
pp. 411-416
Author(s):  
X. Liu ◽  
Y. Gao ◽  
S. To ◽  
Wing Bun Lee
Keyword(s):  
Machine Surface ◽  
Vibration Characteristics ◽  
Surface Measurement ◽  
Lateral Shear ◽  
Shear Interferometer

Anti-Vibration Characteristics of a Lateral Shear Interferometer for On-Machine Surface Measurement

2005 ◽  
Vol 295-296 ◽  
pp. 411-416 ◽  
Author(s):  
X. Liu ◽  
Y. Gao ◽  
Suet To ◽  
Wing Bun Lee
Keyword(s):  
Machine Surface ◽  
Optical Model ◽  
Experimental Tests ◽  
Measurement Range ◽  
Vibration Characteristics ◽  
Surface Measurement ◽  
Lateral Shear ◽  
Large Measurement ◽  
Similar Accuracy ◽  
Shear Interferometer

Lateral shear interferometers have large measurement range and good anti-disturbance ability. They have similar accuracy compared with the reference based interferometers. Based on a specially designed shear generator, a new lateral shear interferometer is proposed. The new system has a complete common optical path and a simple mechanism. The optical model of the interferometer is presented and the anti-vibration characteristics are analyzed. To validate its antivibration ability for on-machine surface measurement, experimental tests have been conducted and results presented.

Holographic lateral shear interferometer

1976 ◽  
Vol 15 (11) ◽  
pp. 2695 ◽  
Author(s):  
D. Malacara ◽  
S. Mallick
Keyword(s):  
Lateral Shear ◽  
Shear Interferometer

A holographic, radial and lateral shear interferometer

1974 ◽  
Vol 12 (1) ◽  
pp. 29-31 ◽  
Author(s):  
Jean Claude Fouéré ◽  
Chandrasekhar Roychoudhuri
Keyword(s):  
Lateral Shear ◽  
Shear Interferometer

Design and fabrication of a variable frequency grating and its application as a lateral-shear interferometer having a variable shear

2007 ◽  
Vol 39 (2) ◽  
pp. 338-346 ◽  
Author(s):  
R.P. Shukla ◽  
N.C. Das ◽  
Murty V. Mantravadi ◽  
D. Cook ◽  
M.D. Aggarwal
Keyword(s):  
Variable Frequency ◽  
Lateral Shear ◽  
Variable Shear ◽  
Shear Interferometer
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