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Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application
Microelectronic Engineering
◽
10.1016/j.mee.2014.11.011
◽
2015
◽
Vol 133
◽
pp. 1-5
◽
Cited By ~ 6
Author(s):
Nur Hamizah Zainal Ariffin
◽
Hafizal Yahaya
◽
Shunji Shinano
◽
Satoru Tanaka
◽
Abdul Manaf Hashim
Keyword(s):
Silicon Nitride
◽
Focused Ion Beam
◽
Ion Beam
◽
Micropore Structure
◽
Biosensor Application
◽
Focused Ion Beam Milling
Download Full-text
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References
Detailed Investigation of Silicon Nitride Phase Plates Prepared by Focused Ion Beam Milling
Microscopy and Microanalysis
◽
10.1017/s1431927619005233
◽
2019
◽
Vol 25
(S2)
◽
pp. 900-901
Author(s):
Alexander Müller
◽
Daniel B. Durham
◽
Karen C. Bustillo
◽
Frances I. Allen
◽
Andrew M. Minor
◽
...
Keyword(s):
Silicon Nitride
◽
Focused Ion Beam
◽
Ion Beam
◽
Nitride Phase
◽
Phase Plates
◽
Focused Ion Beam Milling
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A streamlined workflow for automated cryo focused ion beam milling
Journal of Structural Biology
◽
10.1016/j.jsb.2021.107743
◽
2021
◽
pp. 107743
Author(s):
Sebastian Tacke
◽
Philipp Erdmann
◽
Zhexin Wang
◽
Sven Klumpe
◽
Michael Grange
◽
...
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Focused Ion Beam Milling
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Addressable Metal-Ferroelectric-Metal Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling
Integrated Ferroelectrics
◽
10.1080/10584587.2012.660832
◽
2012
◽
Vol 132
(1)
◽
pp. 99-106
Author(s):
Ying Dai
◽
Lei Yang
◽
Longhai Wang
◽
Bin Tian
◽
Lianying Zou
◽
...
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Focused Ion Beam Milling
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A study of angular effects in focused ion beam milling of water ice
Journal of Micromechanics and Microengineering
◽
10.1088/0960-1317/18/9/095010
◽
2008
◽
Vol 18
(9)
◽
pp. 095010
◽
Cited By ~ 12
Author(s):
Jing Fu
◽
Sanjay B Joshi
◽
Jeffrey M Catchmark
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Water Ice
◽
Focused Ion Beam Milling
Download Full-text
Surface amorphization, sputter rate, and intrinsic stresses of silicon during low energy Ga+ focused-ion beam milling
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/j.nimb.2009.06.094
◽
2009
◽
Vol 267
(18)
◽
pp. 3072-3075
◽
Cited By ~ 36
Author(s):
Lars Pastewka
◽
Roland Salzer
◽
Andreas Graff
◽
Frank Altmann
◽
Michael Moseler
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Low Energy
◽
Focused Ion Beam Milling
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Properties of Individually Addressable Ferroelectric Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling
Journal of Nanoscience and Nanotechnology
◽
10.1166/jnn.2013.7482
◽
2013
◽
Vol 13
(8)
◽
pp. 5542-5546
◽
Cited By ~ 1
Author(s):
Ying Dai
◽
Lei Yang
◽
Longhai Wang
◽
Lianying Zou
◽
Bin Tian
◽
...
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Focused Ion Beam Milling
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Quantitative off-axis electron holography of GaAsp-njunctions prepared by focused ion beam milling
Journal of Microscopy
◽
10.1111/j.1365-2818.2008.03101.x
◽
2009
◽
Vol 233
(1)
◽
pp. 102-113
◽
Cited By ~ 23
Author(s):
D. COOPER
◽
R. TRUCHE
◽
A.C. TWITCHETT-HARRISON
◽
R.E. DUNIN-BORKOWSKI
◽
P.A. MIDGLEY
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Electron Holography
◽
Focused Ion Beam Milling
Download Full-text
Experimental investigation of redeposition during focused ion beam milling of high speed steel
Precision Engineering
◽
10.1016/j.precisioneng.2011.12.005
◽
2012
◽
Vol 36
(3)
◽
pp. 408-413
◽
Cited By ~ 10
Author(s):
Sanket N. Bhavsar
◽
Sivanandam Aravindan
◽
P. Venkateswara Rao
Keyword(s):
Experimental Investigation
◽
High Speed
◽
Focused Ion Beam
◽
Ion Beam
◽
High Speed Steel
◽
Focused Ion Beam Milling
Download Full-text
Study and formation of 2D microstructures of sapphire by focused ion beam milling
Microelectronic Engineering
◽
10.1016/j.mee.2007.11.009
◽
2008
◽
Vol 85
(3)
◽
pp. 640-645
◽
Cited By ~ 15
Author(s):
Tao Dai
◽
Xiangning Kang
◽
Bei Zhang
◽
Jun Xu
◽
Kui Bao
◽
...
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Focused Ion Beam Milling
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Lasing in a ZnO membrane microcavity with designable shape fabricated by focused ion beam milling
2015 20th Microoptics Conference (MOC)
◽
10.1109/moc.2015.7416387
◽
2015
◽
Author(s):
Tsu-Chi Chang
◽
Ying-Yu Lai
◽
Yu-Hsun Chou
◽
Tien-Chang Lu
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Focused Ion Beam Milling
Download Full-text
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