Accuracy of a reference-free Monte Carlo approach for SEM-EDS thickness assessment of TiN coatings onto diverse substrates
2009 ◽
Vol 8
(3-4)
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pp. 324-335
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2008 ◽
Vol 227
(4)
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pp. 2666-2673
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Keyword(s):
Keyword(s):
2002 ◽
Vol 21
(4)
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pp. 415-432
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Keyword(s):
2011 ◽
Vol 8
(6)
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pp. 065006
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2015 ◽
Vol 163
(3)
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pp. A329-A337
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