Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering

2006 ◽  
Vol 131 (1-3) ◽  
pp. 62-71 ◽  
Author(s):  
K. Chu ◽  
P.W. Shum ◽  
Y.G. Shen
Keyword(s):  
Solid Solution ◽  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Substitutional Solid Solution ◽  
Reactive Magnetron Sputtering ◽  
Substrate Bias ◽  
Reactive Magnetron ◽  
Mechanical And Tribological Properties

Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

Wear ◽  
2001 ◽  
Vol 248 (1-2) ◽  
pp. 55-64 ◽  
Author(s):  
E. Broitman ◽  
N. Hellgren ◽  
O. Wänstrand ◽  
M.P. Johansson ◽  
T. Berlind ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Mechanical And Tribological Properties ◽  
Cnx Films
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