Study of process parameters and formative mechanism of patterns on a dip-pen nanolithography array using molecular dynamics simulations

Polymer ◽  
2012 ◽  
Vol 53 (3) ◽  
pp. 857-863 ◽  
Author(s):  
Cheng-Da Wu ◽  
Te-Hua Fang ◽  
Tsung-Tse Wu
Metals ◽  
2020 ◽  
Vol 10 (9) ◽  
pp. 1220
Author(s):  
Michail Papanikolaou ◽  
Francisco Rodriguez Hernandez ◽  
Konstantinos Salonitis

In this investigation, three-dimensional molecular dynamics simulations have been performed in order to investigate the effects of the workpiece subsurface temperature on various nanocutting process parameters including cutting forces, friction coefficient, as well as the distribution of temperature and equivalent Von Mises stress at the subsurface. The simulation domain consists of a tool with a negative rake angle made of diamond and a workpiece made of copper. The grinding speed was considered equal to 100 m/s, while the depth of cut was set to 2 nm. The obtained results suggest that the subsurface temperature significantly affects all of the aforementioned nanocutting process parameters. More specifically, it has been numerically validated that, for high subsurface temperature values, thermal softening becomes dominant and this results in the reduction of the cutting forces. Finally, the dependency of local properties of the workpiece material, such as thermal conductivity and residual stresses on the subsurface temperature has been captured using numerical simulations for the first time to the authors’ best knowledge.


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