scholarly journals Fundamental Study on Sputter Deposition of Ceramic Film by Large-Area Electron Beam Irradiation

Procedia CIRP ◽  
2013 ◽  
Vol 6 ◽  
pp. 486-491 ◽  
Author(s):  
S. Misumi ◽  
A. Okada ◽  
Y. Okamoto ◽  
M. Inoue
2009 ◽  
Vol 28 (5) ◽  
pp. 571-577 ◽  
Author(s):  
Junko TOKUNAGA ◽  
Tetsuya KOJIMA ◽  
Soichiro KINUTA ◽  
Kazumichi WAKABAYASHI ◽  
Takashi NAKAMURA ◽  
...  

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