Design of a 6-DOF precision positioning stage: Kinematic analysis and dynamic modeling
2016 ◽
Vol 33
(7)
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pp. 579-586
Keyword(s):
Keyword(s):
Keyword(s):
2013 ◽
Vol 694-697
◽
pp. 767-770
2016 ◽
Vol 8
(8)
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pp. 168781401666429
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Keyword(s):
2015 ◽
Vol 51
(2)
◽
pp. 198
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2012 ◽
Vol 2
(2)
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pp. 1-14
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2012 ◽
Vol 20
(12)
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pp. 2686-2695
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2002 ◽
Vol 102
(1-2)
◽
pp. 83-92
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