Dynamic modeling method for air bearings in ultra-precision positioning stages
2016 ◽
Vol 8
(8)
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pp. 168781401666429
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Keyword(s):
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2013 ◽
Vol 475-476
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pp. 1551-1554
2015 ◽
Vol 51
(2)
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pp. 198
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2003 ◽
Vol 27
(6)
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pp. 1014-1019
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Keyword(s):
2011 ◽
Vol 35
(3)
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pp. 521-524
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Keyword(s):
2011 ◽
Vol 87
◽
pp. 200-205
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Keyword(s):