Simulation study for a proposed segmented automated material handling system design for 300-mm semiconductor fabs

2012 ◽  
Vol 29 ◽  
pp. 18-31 ◽  
Author(s):  
Chiung-Hsi Hsieh ◽  
Chiwoon Cho ◽  
Taho Yang ◽  
Ting-Jiun Chang
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