Simulation study for a proposed segmented automated material handling system design for 300-mm semiconductor fabs
2012 ◽
Vol 29
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pp. 18-31
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2019 ◽
Vol 13
(3)
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pp. 400
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1989 ◽
Vol 20
◽
pp. 433-440
1983 ◽
Vol 4
(2)
◽
pp. 139-145
◽
2017 ◽
Vol 257
◽
pp. 012017
2020 ◽
Vol 33
(1)
◽
pp. 13-22
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