Characterization of Al2O3 thin films prepared by spray pyrolysis method for humidity sensor
2007 ◽
Vol 135
(2)
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pp. 552-557
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2018 ◽
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2008 ◽
Vol 41
(24)
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pp. 245403
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1989 ◽
Vol 24
(6)
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pp. 753-760
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1996 ◽
Vol 167
(3-4)
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pp. 656-659
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2020 ◽
Vol 1664
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pp. 012069
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1996 ◽
Vol 82
(3)
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pp. 291-293
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