Integration of trench-isolated through-wafer interconnects with 2d capacitive micromachined ultrasonic transducer arrays

Sensors and Actuators A Physical ◽

10.1016/j.sna.2007.04.008 ◽

2007 ◽

Vol 138 (1) ◽

pp. 221-229 ◽

Author(s):

Xuefeng Zhuang ◽

Arif S. Ergun ◽

Yongli Huang ◽

Ira O. Wygant ◽

Omer Oralkan ◽

...

Keyword(s):

Ultrasonic Transducer ◽

Transducer Arrays ◽

Capacitive Micromachined Ultrasonic Transducer

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Volumetric imaging using 2D capacitive micromachined ultrasonic transducer arrays (CMUTs): initial results

2002 IEEE Ultrasonics Symposium, 2002. Proceedings. ◽

10.1109/ultsym.2002.1192483 ◽

2003 ◽

Author(s):

O. Oralkan ◽

A.S. Ergun ◽

Ching-hsiang Cheng ◽

J.A. Johnson ◽

M. Karaman ◽

...

Keyword(s):

Ultrasonic Transducer ◽

Volumetric Imaging ◽

Transducer Arrays ◽

Capacitive Micromachined Ultrasonic Transducer ◽

Initial Results

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Medical imaging using capacitive micromachined ultrasonic transducer arrays

Ultrasonics ◽

10.1016/s0041-624x(02)00161-0 ◽

2002 ◽

Vol 40 (1-8) ◽

pp. 471-476 ◽

Author(s):

Jeremy Johnson ◽

Ömer Oralkan ◽

Utkan Demirci ◽

Sanlı Ergun ◽

Mustafa Karaman ◽

...

Keyword(s):

Medical Imaging ◽

Ultrasonic Transducer ◽

Transducer Arrays ◽

Capacitive Micromachined Ultrasonic Transducer

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Underwater acoustic imaging using capacitive micromachined ultrasonic transducer arrays

OCEANS '02 MTS/IEEE ◽

10.1109/oceans.2002.1191996 ◽

2005 ◽

Author(s):

O. Oralkan ◽

A.S. Ergun ◽

C.-H. Cheng ◽

J.A. Johnson ◽

M. Karaman ◽

...

Keyword(s):

Ultrasonic Transducer ◽

Acoustic Imaging ◽

Underwater Acoustic ◽

Transducer Arrays ◽

Capacitive Micromachined Ultrasonic Transducer

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Fabrication of Capacitive Micromachined Ultrasonic Transducer Arrays With Isolation Trenches Using Anodic Wafer Bonding

IEEE Sensors Journal ◽

10.1109/jsen.2015.2437394 ◽

2015 ◽

Vol 15 (9) ◽

pp. 5177-5184 ◽

Author(s):

Ravindra Mukhiya ◽

Aditi ◽

K. Prabakar ◽

M. Raghuramaiah ◽

J. Jayapandian ◽

...

Keyword(s):

Wafer Bonding ◽

Ultrasonic Transducer ◽

Transducer Arrays ◽

Capacitive Micromachined Ultrasonic Transducer

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Initial pulse-echo imaging results with one-dimensional capacitive micromachined ultrasonic transducer arrays

2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121) ◽

10.1109/ultsym.2000.922700 ◽

2002 ◽

Author(s):

O. Oralkan ◽

X.C. Jin ◽

K. Kaviani ◽

A.S. Ergun ◽

F.L. Degertekin ◽

...

Keyword(s):

Ultrasonic Transducer ◽

Initial Pulse ◽

One Dimensional ◽

Imaging Results ◽

Transducer Arrays ◽

Capacitive Micromachined Ultrasonic Transducer ◽

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Integrated Ultrasound Imaging Systems Based on Capacitive Micromachined Ultrasonic Transducer Arrays

IEEE Sensors, 2005. ◽

10.1109/icsens.2005.1597796 ◽

2006 ◽

Author(s):

I.O. Wygant ◽

D.T. Yeh ◽

Xuefeng Zhuang ◽

S. Vaithilingam ◽

A. Nikoozadeh ◽

...

Keyword(s):

Ultrasound Imaging ◽

Ultrasonic Transducer ◽

Imaging Systems ◽

Transducer Arrays ◽

Capacitive Micromachined Ultrasonic Transducer

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A high-frequency and high-frame-rate ultrasound imaging system design on an FPGA evaluation board for capacitive micromachined ultrasonic transducer arrays

2017 IEEE International Ultrasonics Symposium (IUS) ◽

10.1109/ultsym.2017.8091802 ◽

2017 ◽

Author(s):

Xun Wu ◽

Jean Sanders ◽

Xiao Zhang ◽

F. Yalcin Yamaner ◽

Omer Oralkan

Keyword(s):

System Design ◽

Ultrasound Imaging ◽

High Frequency ◽

Imaging System ◽

Ultrasonic Transducer ◽

Transducer Arrays ◽

Capacitive Micromachined Ultrasonic Transducer ◽

Evaluation Board ◽

Imaging System Design

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Radiation pattern deterioration for phase steered capacitive micromachined ultrasonic transducer arrays due to cross coupling

2011 IEEE International Ultrasonics Symposium ◽

10.1109/ultsym.2011.0086 ◽

2011 ◽

Author(s):

Erlend Leirset ◽

Arne Ronnekleiv ◽

Astrid Aksnes

Keyword(s):

Radiation Pattern ◽

Ultrasonic Transducer ◽

Cross Coupling ◽

Transducer Arrays ◽

Capacitive Micromachined Ultrasonic Transducer

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A high-frequency and high-frame-rate ultrasound imaging system design for capacitive micromachined ultrasonic transducer arrays on an FPGA evaluation board

2017 IEEE International Ultrasonics Symposium (IUS) ◽

10.1109/ultsym.2017.8091897 ◽

2017 ◽

Author(s):

Xun Wu ◽

Jean Sanders ◽

Xiao Zhang ◽

F. Yalcin Yamaner ◽

Omer Oralkan

Keyword(s):

System Design ◽

Ultrasound Imaging ◽

High Frequency ◽

Imaging System ◽

Ultrasonic Transducer ◽

Transducer Arrays ◽

Capacitive Micromachined Ultrasonic Transducer ◽

Evaluation Board ◽

Imaging System Design

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Optical vibration measurements of cross coupling effects in capacitive micromachined ultrasonic transducer arrays

10.1117/12.889835 ◽

2011 ◽

Author(s):

Erlend Leirset ◽

Astrid Aksnes

Keyword(s):

Ultrasonic Transducer ◽

Cross Coupling ◽

Coupling Effects ◽

Vibration Measurements ◽

Transducer Arrays ◽

Capacitive Micromachined Ultrasonic Transducer ◽

Optical Vibration

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