scholarly journals Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor

2020 ◽  
Vol 309 ◽  
pp. 112017
Author(s):  
You Zhao ◽  
Yu-Long Zhao ◽  
Lu-Kang Wang
Keyword(s):  
Silicon Carbide ◽  
High Temperature ◽  
Femtosecond Laser ◽  
Pressure Sensor ◽  
Laser Micromachining ◽  
Deep Etching ◽  
Femtosecond Laser Micromachining

Development of an industrial femtosecond laser micromachining system

2002 ◽  
Author(s):  
Andreas Ostendorf ◽  
Thorsten Bauer ◽  
Frank Korte ◽  
Jonathon R. Howorth ◽  
Carsten Momma ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Micromachining ◽  
Femtosecond Laser Micromachining

X-ray emission from femtosecond laser micromachining

2001 ◽  
Vol 73 (3) ◽  
pp. 361-363 ◽  
Author(s):  
J. Thogersen ◽  
A. Borowiec ◽  
H.K. Haugen ◽  
F.E. McNeill ◽  
I.M. Stronach
Keyword(s):  
Femtosecond Laser ◽  
Laser Micromachining ◽  
X Ray ◽  
Femtosecond Laser Micromachining
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