Adhesion-promoted copolymers based on norbornene derivatives and maleic anhydride for 193-nm photoresists

Polymer ◽  
2000 ◽  
Vol 41 (22) ◽  
pp. 8035-8039 ◽  
Author(s):  
J.-B Kim ◽  
H.-J Yun ◽  
Y.-G Kwon ◽  
B.-W Lee
Keyword(s):  
Maleic Anhydride ◽  
193 Nm ◽  
Norbornene Derivatives

Synthesis of Cycloolefin−Maleic Anhydride Alternating Copolymers for 193 nm Imaging

1997 ◽  
Vol 30 (21) ◽  
pp. 6517-6524 ◽  
Author(s):  
F. M. Houlihan ◽  
T. I. Wallow ◽  
O. Nalamasu ◽  
E. Reichmanis
Keyword(s):  
Maleic Anhydride ◽  
Alternating Copolymers ◽  
193 Nm

Base additives for use in a single layer 193-nm resist based upon poly(norbornene/maleic anhydride/acrylic acid/ tert -butyl acrylate)

2001 ◽  
Author(s):  
Francis M. Houlihan ◽  
Donna Person ◽  
Omkaram Nalamasu ◽  
Ilya Rushkin ◽  
Ognian N. Dimov ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Acrylic Acid ◽  
Butyl Acrylate ◽  
Single Layer ◽  
Tert Butyl ◽  
193 Nm

Ring opened maleic anhydride and norbornene copolymers (ROMA) have a good character in resist flow process for 193-nm resist technology

2003 ◽  
Author(s):  
Hyun-Sang Joo ◽  
Dong Chul Seo ◽  
Chang Min Kim ◽  
Young Taek Lim ◽  
Seong Duk Cho ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Flow Process ◽  
193 Nm

Cycloolefin/maleic anhydride copolymers for 193-nm resist compositions

1999 ◽  
Author(s):  
M. D. Rahman ◽  
Ralph R. Dammel ◽  
Michelle M. Cook ◽  
Stanley A. Ficner ◽  
Munirathna Padmanaban ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
193 Nm ◽  
Maleic Anhydride Copolymers

Poly(t-butyl-3α-(5-norbornene-2-carbonyloxy)-7α,12α-dihydroxy-5β-cholan-24-oate-co-maleic anhydride) for a 193-nm photoresist

Polymer ◽  
1999 ◽  
Vol 40 (26) ◽  
pp. 7423-7426 ◽  
Author(s):  
Jin-Baek Kim ◽  
Bum-Wook Lee ◽  
Jae-Sung Kang ◽  
Dong-Chul Seo ◽  
Chi-Hyung Roh
Keyword(s):  
Maleic Anhydride ◽  
193 Nm

Novel hybrid copolymers of cycloolefin/maleic anhydride (COMA)/methacrylate for 193-nm resist compositions

2001 ◽  
Author(s):  
M. D. Rahman ◽  
Douglas S. McKenzie ◽  
Jun-Bom Bae ◽  
Takanori Kudo ◽  
Woo-Kyu Kim ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Hybrid Copolymers ◽  
193 Nm

193 nm Single Layer Resist Based on Poly(norbornene-alt-maleic anhydride) Derivatives

1998 ◽  
pp. 191-207 ◽  
Author(s):  
F. M. Houlihan ◽  
A. Timko ◽  
R. Hutton ◽  
R. Cirelli ◽  
J. M. Kometani ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Single Layer ◽  
193 Nm
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