Identification and gas phase kinetics of radical species in Cat-CVD processes of SiH4
2015 ◽
Vol 119
(35)
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pp. 9294-9306
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1979 ◽
Vol 101
(14)
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pp. 3724-3730
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1987 ◽
Vol 87
(2)
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pp. 921-925
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1976 ◽
Vol 8
(6)
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pp. 809-815
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Keyword(s):
1995 ◽
Vol 27
(5)
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pp. 517-523
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2015 ◽
Vol 119
(13)
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pp. 3194-3199
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