An exact algorithm for self-calibration of two-dimensional precision metrology stages

1997 ◽  
Vol 20 (1) ◽  
pp. 16-32 ◽  
Author(s):  
J. Ye ◽  
M. Takac ◽  
C.N. Berglund ◽  
G. Owen ◽  
R.F. Pease
Keyword(s):  
Exact Algorithm ◽  
Two Dimensional ◽  
Dimensional Precision ◽  
Self Calibration ◽  
Precision Metrology

Exact algorithm self-calibration of two-dimensional precision metrology stages

1999 ◽  
Vol 21 (2) ◽  
pp. 187 ◽  
Author(s):  
J. Ye ◽  
M. Takac ◽  
C.N. Berglund ◽  
G. Owen ◽  
R.F. Pease
Keyword(s):  
Exact Algorithm ◽  
Two Dimensional ◽  
Dimensional Precision ◽  
Self Calibration ◽  
Precision Metrology

Positioning error calibration for two-dimensional precision stages via globally optimized image registration

Measurement ◽  
2021 ◽  
pp. 110222
Author(s):  
Jian Wang ◽  
Wenyi Zhao ◽  
Richard Leach ◽  
Long Xu ◽  
Wenlong Lu ◽  
...  
Keyword(s):  
Image Registration ◽  
Two Dimensional ◽  
Positioning Error ◽  
Dimensional Precision ◽  
Error Calibration

The Error Analysis and Compensation of Two-Dimensional Precision Positioning Platform

2012 ◽  
Vol 268-270 ◽  
pp. 1380-1384
Author(s):  
Mu Cheng Zhu ◽  
Xian Peng Luo ◽  
Ya Ping Wang
Keyword(s):  
Error Compensation ◽  
Compensation Effect ◽  
Closed Loop ◽  
Two Dimensional ◽  
Location Error ◽  
Precision Positioning ◽  
Positioning Accuracy ◽  
Loop Control ◽  
Dimensional Precision ◽  
Motion Control Card

Through measuring and analyzing the location error of two-dimensional precision positioning system based on the motion control card, and according to the deficiency of the first error compensation, a strategy that enhance addition based on first error compensation was put forward. That using closed loop control to compensate and correct the location error makes the positioning accuracy improved obviously, and achieves an ideal compensation effect. Under the loading conditions, X axial positioning accuracy reached 11μm, Y axial positioning accuracy reached 10μm.

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