The effect of AlN underlayer on c-axis orientation of barium ferrite thin films for perpendicular magnetic recording media

The Co3Pt magnetic layer with thickness of 7~28 nm was deposited onto the Pt underlayer. The as-deposited Co3Pt/Pt double-layered films with or without a 5 nm Pt capped layer were annealed at temperatures between 275 and 375 °C in vacuum of 1 mTorr. The influences of process parameters on perpendicular magnetic properties of Co3Pt thin films were investigated. The Co3Pt film with perpendicular coercivity (Hc⊥) value of 3620 Oe and the perpendicular squareness (S⊥) of 0.7 could be achieved from the Co3Pt(18 nm)/Pt(100 nm) double-layered films by annealing at 300°C. Further added Tb30Co70 film on the Co3Pt/Pt double-layered film could greatly enhance the perpendicular magnetic properties of the film. The Hc⊥ and S⊥ of the Tb30Co70/Co3Pt/Pt film were as high as 6560 Oe and 0.88, respectively, which has significant potential to be applied in perpendicular magnetic recording media.

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Growth Structure of Thin Films for Perpendicular Magnetic Recording Media

Crystal Research and Technology ◽

10.1002/1521-4079(200007)35:6/7<707::aid-crat707>3.0.co;2-n ◽

2000 ◽

Vol 35 (6-7) ◽

pp. 707-711 ◽

Cited By ~ 12

Author(s):

G. Radnóczi ◽

P.B. Barna ◽

M. Adamik ◽

Zs. Czigány ◽

J. Ariake ◽

...

Keyword(s):

Thin Films ◽

Magnetic Recording ◽

Recording Media ◽

Magnetic Recording Media ◽

Perpendicular Magnetic Recording ◽

Growth Structure

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Vacuum evaporated Co-O thin films for perpendicular magnetic recording media

IEEE Transactions on Magnetics ◽

10.1109/20.42563 ◽

1989 ◽

Vol 25 (5) ◽

pp. 4186-4188 ◽

Cited By ~ 21

Author(s):

Y. Tateno ◽

K. Iwasaki ◽

H. Naruse ◽

R. Chubachi

Keyword(s):

Thin Films ◽

Magnetic Recording ◽

Recording Media ◽

Magnetic Recording Media ◽

Perpendicular Magnetic Recording

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Improvement of crystallographic characteristics of CoCrTa thin film using double underlayer

MRS Proceedings ◽

10.1557/proc-674-t3.7 ◽

2001 ◽

Vol 674 ◽

Author(s):

Y.J. Kim ◽

S.H. Kong ◽

S. Nakagawa ◽

M. Naoe ◽

K.H. Kim

Keyword(s):

Thin Film ◽

Magnetic Recording ◽

Magnetic Layer ◽

Recording Media ◽

Interlayer Thickness ◽

Magnetic Recording Media ◽

Axis Orientation ◽

Perpendicular Magnetic Recording ◽

High Density Recording ◽

Crystallographic Characteristics

ABSTRACTHigh c-axis oriented CoCr-based thin films are expected for ultra-high density recording media in perpendicular magnetic recording system. In order to improve dispersion angle of c-axis of CoCr-based for perpendicular magnetic recording media, we prepared trilayered film with double underlayer using New Facing Targets Sputtering apparatus. The thickness of magnetic layer CoCrTa and double underlayer, such as interlayer Pt, paramagnetic CoCr, underlayer Ti was fixed 50nm and 20nm respectively. In order to prepare the thin film, we fixed argon gas pressure 1mTorr, substrate temperature 250°C and input current 0.5A. The crystallographic characteristics of CoCrTa layer with varying interlayer thickness (0- 20nm) have been investigated. By the result, the CoCrTa trilayered thin film with interlayer Pt showed good c-axis orientation 3.45° and 3.62° at thickness 5nm and 10nm respectively. However, CoCrTa thin film using interlayer paramagnetic CoCr showed 8.28° and 8.62° at thickness 5nm and 10nm respectively.

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