High-rate electron cyclotron resonance etching of GaAs via holes

2000 ◽  
Vol 74 (1-3) ◽  
pp. 282-285 ◽  
Author(s):  
Y.W. Chen ◽  
B.S. Ooi ◽  
G.I. Ng ◽  
C.L. Tan
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
High Rate ◽  
Via Holes

Advances in the deposition of microcrystalline silicon at high rate by distributed electron cyclotron resonance

2008 ◽  
Vol 516 (20) ◽  
pp. 6834-6838 ◽  
Author(s):  
P. Roca i Cabarrocas ◽  
P. Bulkin ◽  
D. Daineka ◽  
T.H. Dao ◽  
P. Leempoel ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
High Rate ◽  
Microcrystalline Silicon
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