electron cyclotron resonance plasma Recently Published Documents

Electron Cyclotron ◽

Spherical Tokamak ◽

Plasma Current ◽

Effect of nitrogen flow on the properties of carbon nitride films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Vacuum ◽

10.1016/j.vacuum.2021.110223 ◽

2021 ◽

pp. 110223

Author(s):

Sixu Lin ◽

Dong Xie ◽

Yongliang Tang ◽

Yiwen Wang ◽

Fengjuan Jing ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Carbon Nitride ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Nitrogen Flow ◽

Atomic and Electronic Structure of SiOx Films Obtained with Hydrogen Electron Cyclotron Resonance Plasma

Journal of Experimental and Theoretical Physics ◽

10.1134/s1063776120110084 ◽

2020 ◽

Vol 131 (6) ◽

pp. 940-944

Author(s):

T. V. Perevalov ◽

R. M. Kh. Iskhakzai ◽

V. Sh. Aliev ◽

V. A. Gritsenko ◽

I. P. Prosvirin

Keyword(s):

Electronic Structure ◽

Cyclotron Resonance ◽

Electron Cyclotron ◽

Atomic And Electronic Structure ◽

Design of an Electromagnet for Electron Cyclotron Resonance Plasma System for Deposition of Fluorine Doped Tin Oxide

Applied Science and Convergence Technology ◽

10.5757/asct.2020.29.6.143 ◽

2020 ◽

Vol 29 (6) ◽

pp. 143-148

Author(s):

Bup Ju Jeon

Keyword(s):

Tin Oxide ◽

Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma System ◽

In-Situ N2-Plasma Nitridation for High-k HfN Gate Insulator Formed by Electron Cyclotron Resonance Plasma Sputtering

IEICE Transactions on Electronics ◽

10.1587/transele.2019fup0001 ◽

2020 ◽

Vol E103.C (6) ◽

pp. 299-303 ◽

Cited By ~ 1

Author(s):

Shun-ichiro OHMI ◽

Shin ISHIMATSU ◽

Yuske HORIUCHI ◽

Sohya KUDOH

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron ◽

Gate Insulator ◽

Plasma Nitridation ◽

Plasma Sputtering ◽

High K ◽

Modeling of plasma density, argon ion energy and ion velocity functions in a dipolar electron cyclotron resonance plasma source

Vacuum ◽

10.1016/j.vacuum.2020.109215 ◽

2020 ◽

Vol 174 ◽

pp. 109215

Author(s):

Bin Zhang ◽

Xiaobing Zhang

Keyword(s):

Plasma Density ◽

Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Ion Energy ◽

Ion Velocity ◽

Argon Ion ◽

Study of gasdynamic electron cyclotron resonance plasma vacuum ultraviolet emission to optimize negative hydrogen ion production efficiency

Review of Scientific Instruments ◽

10.1063/1.5128313 ◽

2020 ◽

Vol 91 (1) ◽

pp. 013517 ◽

Cited By ~ 1

Author(s):

R. L. Lapin ◽

V. A. Skalyga ◽

I. Izotov ◽

S. V. Razin ◽

R. A. Shaposhnikov ◽

...

Keyword(s):

Cyclotron Resonance ◽

Production Efficiency ◽

Vacuum Ultraviolet ◽

Electron Cyclotron ◽

Hydrogen Ion ◽

Ultraviolet Emission ◽

Ion Production ◽

Effect of surface modification of Ti-6Al-4V alloy by electron cyclotron resonance plasma oxidation

Dental Materials Journal ◽

10.4012/dmj.2020-051 ◽

2020 ◽

Author(s):

Mayumi OIKAWA ◽

Hiroshi MASUMOTO ◽

Naru SHIRAISHI ◽

Yusuke ORII ◽

Takahisa ANADA ◽

...

Keyword(s):

Surface Modification ◽

Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

Resonance Plasma ◽

Effect Of Surface

Low Temperature Fabrication of AlN/Ge Structure Using Electron Cyclotron Resonance Plasma Nitridation

ECS Transactions ◽

10.1149/1.3206628 ◽

2019 ◽

Vol 25 (6) ◽

pp. 301-306

Author(s):

Jun Kishiwada ◽

Nurbaizura Mohamed ◽

Yusuke Oniki ◽

Yoshitaka Iwasaki ◽

Tomo Ueno

Keyword(s):

Low Temperature ◽

Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Nitridation ◽

Study on charge neutralization effect by electron cyclotron resonance plasma source in high vacuum

Journal of Physics Conference Series ◽

10.1088/1742-6596/1322/1/012018 ◽

2019 ◽

Vol 1322 ◽

pp. 012018 ◽

Cited By ~ 1

Author(s):

T Morishita ◽

D Koda ◽

S Hosoda ◽

T Mogami ◽

K Minemura ◽

...

Keyword(s):

Cyclotron Resonance ◽

High Vacuum ◽

Plasma Source ◽

Electron Cyclotron ◽

Charge Neutralization ◽