Relations between the deposition conditions, the microstructure and the defects in PECVD hydrogenated amorphous carbon films; influence on the electronic density of states

2001 ◽  
Vol 10 (2) ◽  
pp. 182-190 ◽  
Author(s):  
M.-L. Theye ◽  
V. Paret ◽  
A. Sadki
2008 ◽  
Vol 47 (4) ◽  
pp. 2200-2204 ◽  
Author(s):  
Ya-Hsin Yang ◽  
Kuen Yi Wu ◽  
Chin-Yang Lee ◽  
Ming Yu Chen ◽  
Jennchang Hwang ◽  
...  

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