Atomic Layer Deposition Nucleation on Isolated Self-Assembled Monolayer Functional Groups: A Combined DFT and Experimental Study

2019 ◽  
Vol 2 (7) ◽  
pp. 4618-4628 ◽  
Author(s):  
Sameer Patwardhan ◽  
Duyen H. Cao ◽  
George C. Schatz ◽  
Alex B. F. Martinson
Keyword(s):  
Experimental Study ◽  
Atomic Layer Deposition ◽  
Functional Groups ◽  
Atomic Layer ◽  
Self Assembled Monolayer ◽  
Layer Deposition ◽  
Self Assembled

EFFECT OF OXYGEN BASED FUNCTIONAL GROUPS ON THE NUCLEATION OF TiO2 BY ATOMIC LAYER DEPOSITION: A THEORETICAL AND EXPERIMENTAL STUDY.

2021 ◽  
pp. 124588
Author(s):  
H.A. Borbón-Nuñez ◽  
Jesús Muñiz ◽  
A.G. El Hachimi ◽  
D. Frausto-Silva ◽  
J.L. Gutiérrez-Díaz ◽  
...  
Keyword(s):  
Experimental Study ◽  
Atomic Layer Deposition ◽  
Functional Groups ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Effect Of Oxygen

Atomic layer deposition of HfO2 on self-assembled monolayer-passivated Ge surfaces

2010 ◽  
Vol 518 (15) ◽  
pp. 4126-4130 ◽  
Author(s):  
Kibyung Park ◽  
Younghwan Lee ◽  
Kyung Taek Im ◽  
June Young Lee ◽  
Sangwoo Lim
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Self Assembled Monolayer ◽  
Layer Deposition ◽  
Self Assembled

Characterizing Self-Assembled Monolayer Breakdown in Area-Selective Atomic Layer Deposition

Langmuir ◽  
2021 ◽  
Vol 37 (39) ◽  
pp. 11637-11645
Author(s):  
Tzu-Ling Liu ◽  
Li Zeng ◽  
Katie L. Nardi ◽  
Dennis M. Hausmann ◽  
Stacey F. Bent
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Self Assembled Monolayer ◽  
Layer Deposition ◽  
Self Assembled

Self-assembled monolayer resist for atomic layer deposition of HfO2 and ZrO2 high-κ gate dielectrics

2004 ◽  
Vol 84 (20) ◽  
pp. 4017-4019 ◽  
Author(s):  
Rong Chen ◽  
Hyoungsub Kim ◽  
Paul C. McIntyre ◽  
Stacey F. Bent
Keyword(s):  
Atomic Layer Deposition ◽  
Gate Dielectrics ◽  
Atomic Layer ◽  
Self Assembled Monolayer ◽  
Layer Deposition ◽  
Self Assembled

Investigation of Self-Assembled Monolayer Resists for Hafnium Dioxide Atomic Layer Deposition

2005 ◽  
Vol 17 (3) ◽  
pp. 536-544 ◽  
Author(s):  
Rong Chen ◽  
Hyoungsub Kim ◽  
Paul C. McIntyre ◽  
Stacey F. Bent
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Hafnium Dioxide ◽  
Self Assembled Monolayer ◽  
Layer Deposition ◽  
Self Assembled

Atomic Layer Deposition of Titanium Oxide on Self-Assembled-Monolayer-Coated Gold

2004 ◽  
Vol 16 (10) ◽  
pp. 1878-1883 ◽  
Author(s):  
Eun K. Seo ◽  
Jung W. Lee ◽  
Hyung M. Sung-Suh ◽  
Myung M. Sung
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Self Assembled Monolayer ◽  
Layer Deposition ◽  
Self Assembled
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